Miniature surface acoustic wave devices with excellent temperature stability using high density metal electrodes and SiO2 film

Michio Kadota, Takeshi Nakao, Kenji Nishiyama, Shunsuke Kido, Masanori Kato, Ryoichi Omote, Hiroshi Yonekura, Norihiko Takada, Ryoichi Kita, Yasuharu Nakai, Daisuke Yamamoto

Research output: Chapter in Book/Report/Conference proceedingConference contribution

5 Citations (Scopus)

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Physics & Astronomy

Engineering & Materials Science