Miniature microwave plasmas generated in high pressure argon

Kenichi Inoue, Sven Stauss, Jaeho Kim, Tsuyohito Ito, Kazuo Terashima

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1 Citation (Scopus)

Abstract

Miniature microwave plasmas with diameters of approximately 1 mm were generated in high-pressure argon (0.1–5.0 MPa) using a microgap electrode. The microwave power required to sustain plasmas was 1–10 W, depending on the pressure. Strong electron-neutral bremsstrahlung emission, indicating an electron temperature of approximately 12000 K, was observed at high pressures (>1 MPa), and electron densities estimated from Stark broadening revealed high values on the order of 1023 m%3. The analysis confirmed that the coefficient for the pressure shift of the Ar I line at 696.5 nm reported by Copley and Camm can be extended to 5 MPa.

Original languageEnglish
Article number058001
JournalJapanese journal of applied physics
Volume57
Issue number5
DOIs
Publication statusPublished - 2018 May

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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