Abstract
Recently, micro sensors for analyzing multi-components are required in various fields. This research aims to develop a miniature Fourier transform infrared (FTIR) spectrometer for use in middle-infrared (mid-IR) range. The miniature FTIR spectrometer is designed, fabricated and evaluated. The spectrometer consists of a Si wishbone interferometer (size: 8 × 8 mm2), Si capacitive displacement sensor, light source with an aperture, and detector. The wishbone interferometer is composed of a rotary comb drive Si electrostatic actuator, micro three-dimensional Si corner cube mirrors and half mirror (Cr-coated ZnSe). The fabricated miniature FTIR spectrometer can operate in mid-IR range, and detection of CO2 and water in ambient atmosphere is demonstrated.
Original language | English |
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Publication status | Published - 2013 |
Event | Smart Systems Integration Conference 2013 - International Conference and Exhibition on Integration Issues of Miniaturized Systems, SSI 2013 - Amsterdam, North Holland, Netherlands Duration: 2013 Mar 13 → 2013 Mar 14 |
Conference
Conference | Smart Systems Integration Conference 2013 - International Conference and Exhibition on Integration Issues of Miniaturized Systems, SSI 2013 |
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Country/Territory | Netherlands |
City | Amsterdam, North Holland |
Period | 13/3/13 → 13/3/14 |
ASJC Scopus subject areas
- Artificial Intelligence
- Computer Networks and Communications
- Computer Science Applications