Miniature Fourier transform infrared spectrometer for multi gas detection

Tatsuyuki Tanahashi; Takahito Ono

Miniature Fourier transform infrared spectrometer for multi gas detection

Tatsuyuki Tanahashi, Takahito Ono

ENG - Mechanical Systems Engineering

Research output: Contribution to conference › Paper › peer-review

Abstract

Recently, micro sensors for analyzing multi-components are required in various fields. This research aims to develop a miniature Fourier transform infrared (FTIR) spectrometer for use in middle-infrared (mid-IR) range. The miniature FTIR spectrometer is designed, fabricated and evaluated. The spectrometer consists of a Si wishbone interferometer (size: 8 × 8 mm²), Si capacitive displacement sensor, light source with an aperture, and detector. The wishbone interferometer is composed of a rotary comb drive Si electrostatic actuator, micro three-dimensional Si corner cube mirrors and half mirror (Cr-coated ZnSe). The fabricated miniature FTIR spectrometer can operate in mid-IR range, and detection of CO₂ and water in ambient atmosphere is demonstrated.

Original language	English
Publication status	Published - 2013
Event	Smart Systems Integration Conference 2013 - International Conference and Exhibition on Integration Issues of Miniaturized Systems, SSI 2013 - Amsterdam, North Holland, Netherlands Duration: 2013 Mar 13 → 2013 Mar 14

Conference

Conference	Smart Systems Integration Conference 2013 - International Conference and Exhibition on Integration Issues of Miniaturized Systems, SSI 2013
Country/Territory	Netherlands
City	Amsterdam, North Holland
Period	13/3/13 → 13/3/14

ASJC Scopus subject areas

Artificial Intelligence
Computer Networks and Communications
Computer Science Applications

Cite this

Miniature Fourier transform infrared spectrometer for multi gas detection. / Tanahashi, Tatsuyuki; Ono, Takahito.

2013. Paper presented at Smart Systems Integration Conference 2013 - International Conference and Exhibition on Integration Issues of Miniaturized Systems, SSI 2013, Amsterdam, North Holland, Netherlands.

Research output: Contribution to conference › Paper › peer-review

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abstract = "Recently, micro sensors for analyzing multi-components are required in various fields. This research aims to develop a miniature Fourier transform infrared (FTIR) spectrometer for use in middle-infrared (mid-IR) range. The miniature FTIR spectrometer is designed, fabricated and evaluated. The spectrometer consists of a Si wishbone interferometer (size: 8 × 8 mm2), Si capacitive displacement sensor, light source with an aperture, and detector. The wishbone interferometer is composed of a rotary comb drive Si electrostatic actuator, micro three-dimensional Si corner cube mirrors and half mirror (Cr-coated ZnSe). The fabricated miniature FTIR spectrometer can operate in mid-IR range, and detection of CO2 and water in ambient atmosphere is demonstrated.",

author = "Tatsuyuki Tanahashi and Takahito Ono",

note = "Funding Information: Part of this work was performed in the Micro/Nano-machining Research Education Center (MNC) of Tohoku University. This work was supported in part by a Grant-in Aid for Scientific Research from the Japanese Ministry of Education, Culture, Sports, Science and Technology of Japan, also supported in part by Special Coordination Funds for Promoting Science and Technology, Formation of Innovation Center for Fusion of Advanced Technologies. Publisher Copyright: {\textcopyright} 2013 Mesago Messe Frankfurt GmbH. All rights reserved.; Smart Systems Integration Conference 2013 - International Conference and Exhibition on Integration Issues of Miniaturized Systems, SSI 2013 ; Conference date: 13-03-2013 Through 14-03-2013",

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AU - Tanahashi, Tatsuyuki

AU - Ono, Takahito

N1 - Funding Information: Part of this work was performed in the Micro/Nano-machining Research Education Center (MNC) of Tohoku University. This work was supported in part by a Grant-in Aid for Scientific Research from the Japanese Ministry of Education, Culture, Sports, Science and Technology of Japan, also supported in part by Special Coordination Funds for Promoting Science and Technology, Formation of Innovation Center for Fusion of Advanced Technologies. Publisher Copyright: © 2013 Mesago Messe Frankfurt GmbH. All rights reserved.

PY - 2013

Y1 - 2013

N2 - Recently, micro sensors for analyzing multi-components are required in various fields. This research aims to develop a miniature Fourier transform infrared (FTIR) spectrometer for use in middle-infrared (mid-IR) range. The miniature FTIR spectrometer is designed, fabricated and evaluated. The spectrometer consists of a Si wishbone interferometer (size: 8 × 8 mm2), Si capacitive displacement sensor, light source with an aperture, and detector. The wishbone interferometer is composed of a rotary comb drive Si electrostatic actuator, micro three-dimensional Si corner cube mirrors and half mirror (Cr-coated ZnSe). The fabricated miniature FTIR spectrometer can operate in mid-IR range, and detection of CO2 and water in ambient atmosphere is demonstrated.

AB - Recently, micro sensors for analyzing multi-components are required in various fields. This research aims to develop a miniature Fourier transform infrared (FTIR) spectrometer for use in middle-infrared (mid-IR) range. The miniature FTIR spectrometer is designed, fabricated and evaluated. The spectrometer consists of a Si wishbone interferometer (size: 8 × 8 mm2), Si capacitive displacement sensor, light source with an aperture, and detector. The wishbone interferometer is composed of a rotary comb drive Si electrostatic actuator, micro three-dimensional Si corner cube mirrors and half mirror (Cr-coated ZnSe). The fabricated miniature FTIR spectrometer can operate in mid-IR range, and detection of CO2 and water in ambient atmosphere is demonstrated.

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M3 - Paper

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T2 - Smart Systems Integration Conference 2013 - International Conference and Exhibition on Integration Issues of Miniaturized Systems, SSI 2013

Y2 - 13 March 2013 through 14 March 2013

ER -

Miniature Fourier transform infrared spectrometer for multi gas detection

Abstract

Conference

ASJC Scopus subject areas

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