Miniature Fourier transform infrared spectrometer for multi gas detection

Tatsuyuki Tanahashi; Takahito Ono

Miniature Fourier transform infrared spectrometer for multi gas detection

Tatsuyuki Tanahashi, Takahito Ono

ENG - Mechanical Systems Engineering

Research output: Contribution to conference › Paper › peer-review

Abstract

Recently, micro sensors for analyzing multi-components are required in various fields. This research aims to develop a miniature Fourier transform infrared (FTIR) spectrometer for use in middle-infrared (mid-IR) range. The miniature FTIR spectrometer is designed, fabricated and evaluated. The spectrometer consists of a Si wishbone interferometer (size: 8 × 8 mm²), Si capacitive displacement sensor, light source with an aperture, and detector. The wishbone interferometer is composed of a rotary comb drive Si electrostatic actuator, micro three-dimensional Si corner cube mirrors and half mirror (Cr-coated ZnSe). The fabricated miniature FTIR spectrometer can operate in mid-IR range, and detection of CO₂ and water in ambient atmosphere is demonstrated.

Original language	English
Publication status	Published - 2013 Jan 1
Event	Smart Systems Integration Conference 2013 - International Conference and Exhibition on Integration Issues of Miniaturized Systems, SSI 2013 - Amsterdam, North Holland, Netherlands Duration: 2013 Mar 13 → 2013 Mar 14

Conference

Conference	Smart Systems Integration Conference 2013 - International Conference and Exhibition on Integration Issues of Miniaturized Systems, SSI 2013
Country	Netherlands
City	Amsterdam, North Holland
Period	13/3/13 → 13/3/14

ASJC Scopus subject areas

Artificial Intelligence
Computer Networks and Communications
Computer Science Applications

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Miniature Fourier transform infrared spectrometer for multi gas detection. / Tanahashi, Tatsuyuki; Ono, Takahito.

2013. Paper presented at Smart Systems Integration Conference 2013 - International Conference and Exhibition on Integration Issues of Miniaturized Systems, SSI 2013, Amsterdam, North Holland, Netherlands.

Research output: Contribution to conference › Paper › peer-review

@conference{dfff0d7b56a040a080fed479d179364c,

title = "Miniature Fourier transform infrared spectrometer for multi gas detection",

abstract = "Recently, micro sensors for analyzing multi-components are required in various fields. This research aims to develop a miniature Fourier transform infrared (FTIR) spectrometer for use in middle-infrared (mid-IR) range. The miniature FTIR spectrometer is designed, fabricated and evaluated. The spectrometer consists of a Si wishbone interferometer (size: 8 × 8 mm2), Si capacitive displacement sensor, light source with an aperture, and detector. The wishbone interferometer is composed of a rotary comb drive Si electrostatic actuator, micro three-dimensional Si corner cube mirrors and half mirror (Cr-coated ZnSe). The fabricated miniature FTIR spectrometer can operate in mid-IR range, and detection of CO2 and water in ambient atmosphere is demonstrated.",

author = "Tatsuyuki Tanahashi and Takahito Ono",

year = "2013",

month = jan,

day = "1",

language = "English",

note = "Smart Systems Integration Conference 2013 - International Conference and Exhibition on Integration Issues of Miniaturized Systems, SSI 2013 ; Conference date: 13-03-2013 Through 14-03-2013",

}

TY - CONF

T1 - Miniature Fourier transform infrared spectrometer for multi gas detection

AU - Tanahashi, Tatsuyuki

AU - Ono, Takahito

PY - 2013/1/1

Y1 - 2013/1/1

N2 - Recently, micro sensors for analyzing multi-components are required in various fields. This research aims to develop a miniature Fourier transform infrared (FTIR) spectrometer for use in middle-infrared (mid-IR) range. The miniature FTIR spectrometer is designed, fabricated and evaluated. The spectrometer consists of a Si wishbone interferometer (size: 8 × 8 mm2), Si capacitive displacement sensor, light source with an aperture, and detector. The wishbone interferometer is composed of a rotary comb drive Si electrostatic actuator, micro three-dimensional Si corner cube mirrors and half mirror (Cr-coated ZnSe). The fabricated miniature FTIR spectrometer can operate in mid-IR range, and detection of CO2 and water in ambient atmosphere is demonstrated.

AB - Recently, micro sensors for analyzing multi-components are required in various fields. This research aims to develop a miniature Fourier transform infrared (FTIR) spectrometer for use in middle-infrared (mid-IR) range. The miniature FTIR spectrometer is designed, fabricated and evaluated. The spectrometer consists of a Si wishbone interferometer (size: 8 × 8 mm2), Si capacitive displacement sensor, light source with an aperture, and detector. The wishbone interferometer is composed of a rotary comb drive Si electrostatic actuator, micro three-dimensional Si corner cube mirrors and half mirror (Cr-coated ZnSe). The fabricated miniature FTIR spectrometer can operate in mid-IR range, and detection of CO2 and water in ambient atmosphere is demonstrated.

UR - http://www.scopus.com/inward/record.url?scp=85064550473&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85064550473&partnerID=8YFLogxK

M3 - Paper

AN - SCOPUS:85064550473

T2 - Smart Systems Integration Conference 2013 - International Conference and Exhibition on Integration Issues of Miniaturized Systems, SSI 2013

Y2 - 13 March 2013 through 14 March 2013

ER -