Miniature Fourier transform infrared spectrometer for multi gas detection

Tatsuyuki Tanahashi, Takahito Ono

Research output: Contribution to conferencePaperpeer-review

Abstract

Recently, micro sensors for analyzing multi-components are required in various fields. This research aims to develop a miniature Fourier transform infrared (FTIR) spectrometer for use in middle-infrared (mid-IR) range. The miniature FTIR spectrometer is designed, fabricated and evaluated. The spectrometer consists of a Si wishbone interferometer (size: 8 × 8 mm2), Si capacitive displacement sensor, light source with an aperture, and detector. The wishbone interferometer is composed of a rotary comb drive Si electrostatic actuator, micro three-dimensional Si corner cube mirrors and half mirror (Cr-coated ZnSe). The fabricated miniature FTIR spectrometer can operate in mid-IR range, and detection of CO2 and water in ambient atmosphere is demonstrated.

Original languageEnglish
Publication statusPublished - 2013 Jan 1
EventSmart Systems Integration Conference 2013 - International Conference and Exhibition on Integration Issues of Miniaturized Systems, SSI 2013 - Amsterdam, North Holland, Netherlands
Duration: 2013 Mar 132013 Mar 14

Conference

ConferenceSmart Systems Integration Conference 2013 - International Conference and Exhibition on Integration Issues of Miniaturized Systems, SSI 2013
CountryNetherlands
CityAmsterdam, North Holland
Period13/3/1313/3/14

ASJC Scopus subject areas

  • Artificial Intelligence
  • Computer Networks and Communications
  • Computer Science Applications

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