Miniature Fourier transform infrared spectrometer for middle infrared wavelength range

Tatsuyuki Tanahashi, Masaya Toda, Hidetoshi Miyashita, Takahito Ono

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

A miniature Fourier transform infrared spectrometer (FTIR) is designed and fabricated. The spectrometer consists of an electrostatically-driven Si wishbone interferometer (size: 8 × 8 mm2), Si capacitive displacement sensor, light source with an aperture, and detector. Three-dimensional Si micromirror is assembled on the interferometer. The miniature FTIR operates in mid-infrared range, and multi gas detection including CO2 and water has been demonstrated using this miniaturized FTIR.

Original languageEnglish
Title of host publication2013 Transducers and Eurosensors XXVII
Subtitle of host publicationThe 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
Pages2509-2512
Number of pages4
DOIs
Publication statusPublished - 2013 Dec 1
Event2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013 - Barcelona, Spain
Duration: 2013 Jun 162013 Jun 20

Publication series

Name2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013

Other

Other2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
CountrySpain
CityBarcelona
Period13/6/1613/6/20

Keywords

  • Miniature Fourier transform infrared spectrometer
  • micro corner cube mirror
  • micro-interferometer
  • multi gas detection

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering

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