@article{111194fae4ec4bbc81c3cc7f90bbf698,
title = "Millimachine Materials and its Characterization",
keywords = "AFM, STM, X-ray, acoustic, bending, micromachine, microscopy, photoacoustics, testing, thermal wave, ultrasonics",
author = "Kazushi Yamanaka and Sizuka Nakano",
year = "1994",
doi = "10.2493/jjspe.60.345",
language = "English",
volume = "60",
pages = "345--351",
journal = "Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering",
issn = "0912-0289",
publisher = "Japan Society for Precision Engineering",
number = "3",
}