Millimachine Materials and its Characterization

Kazushi Yamanaka, Sizuka Nakano

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)345-351
Number of pages7
JournalJournal of the Japan Society for Precision Engineering
Volume60
Issue number3
DOIs
Publication statusPublished - 1994 Jan 1

Keywords

  • AFM
  • STM
  • X-ray
  • acoustic
  • bending
  • micromachine
  • microscopy
  • photoacoustics
  • testing
  • thermal wave
  • ultrasonics

ASJC Scopus subject areas

  • Mechanical Engineering

Cite this