The rapid reduction of feature size in CMOS devices causes their variability to increase, thus reducing the circuit yield -. In particular, the static random access memory (SRAM) cell uses the smallest transistor to achieve high-density integration, the effect of which is a lower yield . The reduction of variability is, therefore, becoming the most important concern for CMOS devices. In this article, we review the effectiveness of introducing multigate devices and microwave annealing (MWA) for performance enhancement.
ASJC Scopus subject areas
- Mechanical Engineering
- Electrical and Electronic Engineering