Abstract
This paper reports a reduction of microvalve leakage based on precise measurements of leak and flow rates. The tight contact between a valve cap and seat, which is obtained by nanometer-scale flat surfaces and by self-alignment of the cap and seat-bore, makes the leakage from a microvalve ultra-low. The leak and flow rates are determined by precisely measuring pressure changes when introducing helium gas into a flow line. We have, consequently, attained a leak rate as low as 5.8×10-10 Pa·ma3/s and a flow rate ranging from 4.0×10-6 to 3.2×10-4 Pa·m3/s.
| Original language | English |
|---|---|
| Pages | 323-326 |
| Number of pages | 4 |
| Publication status | Published - 1997 Jan 1 |
| Externally published | Yes |
| Event | Proceedings of the 1997 10th Annual International Workshop on Micro Electro Mechanical Systems, MEMS - Nagoya, Jpn Duration: 1997 Jan 26 → 1997 Jan 30 |
Other
| Other | Proceedings of the 1997 10th Annual International Workshop on Micro Electro Mechanical Systems, MEMS |
|---|---|
| City | Nagoya, Jpn |
| Period | 97/1/26 → 97/1/30 |
ASJC Scopus subject areas
- Control and Systems Engineering
- Mechanical Engineering
- Electrical and Electronic Engineering
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Cite this
Hirano, M., Yanagisawa, K., Kuwano, H., & Nakano, S. (1997). Microvalve with ultra-low leakage. 323-326. Paper presented at Proceedings of the 1997 10th Annual International Workshop on Micro Electro Mechanical Systems, MEMS, Nagoya, Jpn, .