Microvalve with ultra-low leakage

Motohisa Hirano, Keiichi Yanagisawa, Hiroki Kuwano, Satoko Nakano

Research output: Contribution to conferencePaper

11 Citations (Scopus)

Abstract

This paper reports a reduction of microvalve leakage based on precise measurements of leak and flow rates. The tight contact between a valve cap and seat, which is obtained by nanometer-scale flat surfaces and by self-alignment of the cap and seat-bore, makes the leakage from a microvalve ultra-low. The leak and flow rates are determined by precisely measuring pressure changes when introducing helium gas into a flow line. We have, consequently, attained a leak rate as low as 5.8×10-10 Pa·ma3/s and a flow rate ranging from 4.0×10-6 to 3.2×10-4 Pa·m3/s.

Original languageEnglish
Pages323-326
Number of pages4
Publication statusPublished - 1997 Jan 1
Externally publishedYes
EventProceedings of the 1997 10th Annual International Workshop on Micro Electro Mechanical Systems, MEMS - Nagoya, Jpn
Duration: 1997 Jan 261997 Jan 30

Other

OtherProceedings of the 1997 10th Annual International Workshop on Micro Electro Mechanical Systems, MEMS
CityNagoya, Jpn
Period97/1/2697/1/30

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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  • Cite this

    Hirano, M., Yanagisawa, K., Kuwano, H., & Nakano, S. (1997). Microvalve with ultra-low leakage. 323-326. Paper presented at Proceedings of the 1997 10th Annual International Workshop on Micro Electro Mechanical Systems, MEMS, Nagoya, Jpn, .