Microvalve with ultra-low leakage

Motohisa Hirano; Keiichi Yanagisawa; Hiroki Kuwano; Satoko Nakano

Microvalve with ultra-low leakage

Motohisa Hirano, Keiichi Yanagisawa, Hiroki Kuwano, Satoko Nakano

Research output: Contribution to conference › Paper › peer-review

Abstract

This paper reports a reduction of microvalve leakage based on precise measurements of leak and flow rates. The tight contact between a valve cap and seat, which is obtained by nanometer-scale flat surfaces and by self-alignment of the cap and seat-bore, makes the leakage from a microvalve ultra-low. The leak and flow rates are determined by precisely measuring pressure changes when introducing helium gas into a flow line. We have, consequently, attained a leak rate as low as 5.8×10^-10 Pa·ma³/s and a flow rate ranging from 4.0×10^-6 to 3.2×10^-4 Pa·m³/s.

Original language	English
Pages	323-326
Number of pages	4
Publication status	Published - 1997 Jan 1
Externally published	Yes
Event	Proceedings of the 1997 10th Annual International Workshop on Micro Electro Mechanical Systems, MEMS - Nagoya, Jpn Duration: 1997 Jan 26 → 1997 Jan 30

Other

Other	Proceedings of the 1997 10th Annual International Workshop on Micro Electro Mechanical Systems, MEMS
City	Nagoya, Jpn
Period	97/1/26 → 97/1/30

ASJC Scopus subject areas

Control and Systems Engineering
Mechanical Engineering
Electrical and Electronic Engineering

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title = "Microvalve with ultra-low leakage",

abstract = "This paper reports a reduction of microvalve leakage based on precise measurements of leak and flow rates. The tight contact between a valve cap and seat, which is obtained by nanometer-scale flat surfaces and by self-alignment of the cap and seat-bore, makes the leakage from a microvalve ultra-low. The leak and flow rates are determined by precisely measuring pressure changes when introducing helium gas into a flow line. We have, consequently, attained a leak rate as low as 5.8×10-10 Pa·ma3/s and a flow rate ranging from 4.0×10-6 to 3.2×10-4 Pa·m3/s.",

author = "Motohisa Hirano and Keiichi Yanagisawa and Hiroki Kuwano and Satoko Nakano",

year = "1997",

month = jan,

day = "1",

language = "English",

pages = "323--326",

note = "Proceedings of the 1997 10th Annual International Workshop on Micro Electro Mechanical Systems, MEMS ; Conference date: 26-01-1997 Through 30-01-1997",

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TY - CONF

T1 - Microvalve with ultra-low leakage

AU - Hirano, Motohisa

AU - Yanagisawa, Keiichi

AU - Kuwano, Hiroki

AU - Nakano, Satoko

PY - 1997/1/1

Y1 - 1997/1/1

N2 - This paper reports a reduction of microvalve leakage based on precise measurements of leak and flow rates. The tight contact between a valve cap and seat, which is obtained by nanometer-scale flat surfaces and by self-alignment of the cap and seat-bore, makes the leakage from a microvalve ultra-low. The leak and flow rates are determined by precisely measuring pressure changes when introducing helium gas into a flow line. We have, consequently, attained a leak rate as low as 5.8×10-10 Pa·ma3/s and a flow rate ranging from 4.0×10-6 to 3.2×10-4 Pa·m3/s.

AB - This paper reports a reduction of microvalve leakage based on precise measurements of leak and flow rates. The tight contact between a valve cap and seat, which is obtained by nanometer-scale flat surfaces and by self-alignment of the cap and seat-bore, makes the leakage from a microvalve ultra-low. The leak and flow rates are determined by precisely measuring pressure changes when introducing helium gas into a flow line. We have, consequently, attained a leak rate as low as 5.8×10-10 Pa·ma3/s and a flow rate ranging from 4.0×10-6 to 3.2×10-4 Pa·m3/s.

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UR - http://www.scopus.com/inward/citedby.url?scp=0030718118&partnerID=8YFLogxK

M3 - Paper

AN - SCOPUS:0030718118

SP - 323

EP - 326

T2 - Proceedings of the 1997 10th Annual International Workshop on Micro Electro Mechanical Systems, MEMS

Y2 - 26 January 1997 through 30 January 1997

ER -

Microvalve with ultra-low leakage

Abstract

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ASJC Scopus subject areas

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