Endoscopes and catheters are already widely used and new more precise examinations and diagnoses are required. Small medical devices with several functions for use in the human body can be realized by installing microsensors and microactuators in the medical devices. Several microdevices for minimally invasive examinations and therapies using MEMS (Micro Electro Mechanical Systems) and related microfabrication technologies have been developed. An ultraminiature pressure sensor, a forward-looking intravascular ultrasonic imager and intraluminal MRI probe have been developed. Active bending catheters, endoscopes and guide wires have been developed for steering their tips without using traction of wires from outside the body. Small and light wearable healthcare devices have also been developed using the microfabrication technologies.