TY - GEN
T1 - Microstructure of LiAl5O8 and LiAlO2 films prepared by laser CVD
AU - Chi, Chen
AU - Katsui, Hirokazu
AU - Tu, Rong
AU - Goto, Takashi
N1 - Copyright:
Copyright 2020 Elsevier B.V., All rights reserved.
PY - 2014
Y1 - 2014
N2 - α-LiAl5O8, γ-LiAlO2, α- Al2O3 and those composite films were prepared on AlN polycrystalline substrates by laser chemical vapor deposition (LCVD), and the effects of total pressure (Ptot) and the molar ratio of Li to Al (RLi/Al) on the morphology and deposition rates were investigated. The typical morphology of single-phase γ-LiAlO2 films prepared at RLi/Al > 1.0 and Ptot 400 Pa was granular, whereas γ-LiAlO2 films prepared at Ptot < 200 Pa and γ-LiAlO2-α-LiAl5O8 composite films had pyramidal grains. Single-phase α-LiAl5O8 films showed polygonally faceted morphologies. Composite films of α-LiAl 5O8 and α- Al2O3 consisted of carifllower-like and faceted grains. A single-phase γ-LiAlO2 film deposited at 200 Pa showed the maximum deposition rate of 48 □m h -1.
AB - α-LiAl5O8, γ-LiAlO2, α- Al2O3 and those composite films were prepared on AlN polycrystalline substrates by laser chemical vapor deposition (LCVD), and the effects of total pressure (Ptot) and the molar ratio of Li to Al (RLi/Al) on the morphology and deposition rates were investigated. The typical morphology of single-phase γ-LiAlO2 films prepared at RLi/Al > 1.0 and Ptot 400 Pa was granular, whereas γ-LiAlO2 films prepared at Ptot < 200 Pa and γ-LiAlO2-α-LiAl5O8 composite films had pyramidal grains. Single-phase α-LiAl5O8 films showed polygonally faceted morphologies. Composite films of α-LiAl 5O8 and α- Al2O3 consisted of carifllower-like and faceted grains. A single-phase γ-LiAlO2 film deposited at 200 Pa showed the maximum deposition rate of 48 □m h -1.
KW - Chemical vapor deposition
KW - Morphology
UR - http://www.scopus.com/inward/record.url?scp=84903975500&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84903975500&partnerID=8YFLogxK
U2 - 10.4028/www.scientific.net/KEM.616.223
DO - 10.4028/www.scientific.net/KEM.616.223
M3 - Conference contribution
AN - SCOPUS:84903975500
SN - 9783038351306
T3 - Key Engineering Materials
SP - 223
EP - 226
BT - Advanced Ceramics and Novel Processing
PB - Trans Tech Publications Ltd
T2 - 5th International Symposium on Advanced Ceramics, ISAC 2013 and 3rd International Symposium on Advanced Synthesis and Processing Technology for Materials, ASPT 2013
Y2 - 9 December 2013 through 12 December 2013
ER -