Microstructure of LiAl5O8 and LiAlO2 films prepared by laser CVD

Chen Chi, Hirokazu Katsui, Rong Tu, Takashi Goto

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

α-LiAl5O8, γ-LiAlO2, α- Al2O3 and those composite films were prepared on AlN polycrystalline substrates by laser chemical vapor deposition (LCVD), and the effects of total pressure (Ptot) and the molar ratio of Li to Al (RLi/Al) on the morphology and deposition rates were investigated. The typical morphology of single-phase γ-LiAlO2 films prepared at RLi/Al > 1.0 and Ptot 400 Pa was granular, whereas γ-LiAlO2 films prepared at Ptot < 200 Pa and γ-LiAlO2-α-LiAl5O8 composite films had pyramidal grains. Single-phase α-LiAl5O8 films showed polygonally faceted morphologies. Composite films of α-LiAl 5O8 and α- Al2O3 consisted of carifllower-like and faceted grains. A single-phase γ-LiAlO2 film deposited at 200 Pa showed the maximum deposition rate of 48 □m h -1.

Original languageEnglish
Title of host publicationAdvanced Ceramics and Novel Processing
PublisherTrans Tech Publications Ltd
Pages223-226
Number of pages4
ISBN (Print)9783038351306
DOIs
Publication statusPublished - 2014
Event5th International Symposium on Advanced Ceramics, ISAC 2013 and 3rd International Symposium on Advanced Synthesis and Processing Technology for Materials, ASPT 2013 - Wuhan, China
Duration: 2013 Dec 92013 Dec 12

Publication series

NameKey Engineering Materials
Volume616
ISSN (Print)1013-9826
ISSN (Electronic)1662-9795

Other

Other5th International Symposium on Advanced Ceramics, ISAC 2013 and 3rd International Symposium on Advanced Synthesis and Processing Technology for Materials, ASPT 2013
Country/TerritoryChina
CityWuhan
Period13/12/913/12/12

Keywords

  • Chemical vapor deposition
  • Morphology

ASJC Scopus subject areas

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

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