Microstructure of LiAl5O8 and LiAlO2 films prepared by laser CVD

Chen Chi; Hirokazu Katsui; Rong Tu; Takashi Goto

doi:10.4028/www.scientific.net/KEM.616.223

Microstructure of LiAl₅O₈ and LiAlO₂ films prepared by laser CVD

Chen Chi, Hirokazu Katsui, Rong Tu, Takashi Goto

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

α-LiAl₅O₈, γ-LiAlO₂, α- Al₂O₃ and those composite films were prepared on AlN polycrystalline substrates by laser chemical vapor deposition (LCVD), and the effects of total pressure (P_tot) and the molar ratio of Li to Al (R_Li/Al) on the morphology and deposition rates were investigated. The typical morphology of single-phase γ-LiAlO₂ films prepared at R_Li/Al > 1.0 and P_tot 400 Pa was granular, whereas γ-LiAlO₂ films prepared at P_tot < 200 Pa and γ-LiAlO₂-α-LiAl₅O₈ composite films had pyramidal grains. Single-phase α-LiAl₅O₈ films showed polygonally faceted morphologies. Composite films of α-LiAl ₅O₈ and α- Al₂O₃ consisted of carifllower-like and faceted grains. A single-phase γ-LiAlO₂ film deposited at 200 Pa showed the maximum deposition rate of 48 □m h ^-1.

Original language	English
Title of host publication	Advanced Ceramics and Novel Processing
Publisher	Trans Tech Publications Ltd
Pages	223-226
Number of pages	4
ISBN (Print)	9783038351306
DOIs	https://doi.org/10.4028/www.scientific.net/KEM.616.223
Publication status	Published - 2014
Event	5th International Symposium on Advanced Ceramics, ISAC 2013 and 3rd International Symposium on Advanced Synthesis and Processing Technology for Materials, ASPT 2013 - Wuhan, China Duration: 2013 Dec 9 → 2013 Dec 12

Publication series

Name	Key Engineering Materials
Volume	616
ISSN (Print)	1013-9826
ISSN (Electronic)	1662-9795

Other

Other	5th International Symposium on Advanced Ceramics, ISAC 2013 and 3rd International Symposium on Advanced Synthesis and Processing Technology for Materials, ASPT 2013
Country	China
City	Wuhan
Period	13/12/9 → 13/12/12

Keywords

Chemical vapor deposition
Morphology

ASJC Scopus subject areas

Materials Science(all)
Mechanics of Materials
Mechanical Engineering

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Chi, C, Katsui, H, Tu, R & Goto, T 2014, Microstructure of LiAl₅O₈ and LiAlO₂ films prepared by laser CVD. in Advanced Ceramics and Novel Processing. Key Engineering Materials, vol. 616, Trans Tech Publications Ltd, pp. 223-226, 5th International Symposium on Advanced Ceramics, ISAC 2013 and 3rd International Symposium on Advanced Synthesis and Processing Technology for Materials, ASPT 2013, Wuhan, China, 13/12/9. https://doi.org/10.4028/www.scientific.net/KEM.616.223

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title = "Microstructure of LiAl5O8 and LiAlO2 films prepared by laser CVD",

abstract = "α-LiAl5O8, γ-LiAlO2, α- Al2O3 and those composite films were prepared on AlN polycrystalline substrates by laser chemical vapor deposition (LCVD), and the effects of total pressure (Ptot) and the molar ratio of Li to Al (RLi/Al) on the morphology and deposition rates were investigated. The typical morphology of single-phase γ-LiAlO2 films prepared at RLi/Al > 1.0 and Ptot 400 Pa was granular, whereas γ-LiAlO2 films prepared at Ptot < 200 Pa and γ-LiAlO2-α-LiAl5O8 composite films had pyramidal grains. Single-phase α-LiAl5O8 films showed polygonally faceted morphologies. Composite films of α-LiAl 5O8 and α- Al2O3 consisted of carifllower-like and faceted grains. A single-phase γ-LiAlO2 film deposited at 200 Pa showed the maximum deposition rate of 48 □m h -1.",

keywords = "Chemical vapor deposition, Morphology",

author = "Chen Chi and Hirokazu Katsui and Rong Tu and Takashi Goto",

note = "Copyright: Copyright 2020 Elsevier B.V., All rights reserved.; 5th International Symposium on Advanced Ceramics, ISAC 2013 and 3rd International Symposium on Advanced Synthesis and Processing Technology for Materials, ASPT 2013 ; Conference date: 09-12-2013 Through 12-12-2013",

year = "2014",

doi = "10.4028/www.scientific.net/KEM.616.223",

language = "English",

isbn = "9783038351306",

series = "Key Engineering Materials",

publisher = "Trans Tech Publications Ltd",

pages = "223--226",

booktitle = "Advanced Ceramics and Novel Processing",

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T1 - Microstructure of LiAl5O8 and LiAlO2 films prepared by laser CVD

AU - Chi, Chen

AU - Katsui, Hirokazu

AU - Tu, Rong

AU - Goto, Takashi

PY - 2014

Y1 - 2014

N2 - α-LiAl5O8, γ-LiAlO2, α- Al2O3 and those composite films were prepared on AlN polycrystalline substrates by laser chemical vapor deposition (LCVD), and the effects of total pressure (Ptot) and the molar ratio of Li to Al (RLi/Al) on the morphology and deposition rates were investigated. The typical morphology of single-phase γ-LiAlO2 films prepared at RLi/Al > 1.0 and Ptot 400 Pa was granular, whereas γ-LiAlO2 films prepared at Ptot < 200 Pa and γ-LiAlO2-α-LiAl5O8 composite films had pyramidal grains. Single-phase α-LiAl5O8 films showed polygonally faceted morphologies. Composite films of α-LiAl 5O8 and α- Al2O3 consisted of carifllower-like and faceted grains. A single-phase γ-LiAlO2 film deposited at 200 Pa showed the maximum deposition rate of 48 □m h -1.

AB - α-LiAl5O8, γ-LiAlO2, α- Al2O3 and those composite films were prepared on AlN polycrystalline substrates by laser chemical vapor deposition (LCVD), and the effects of total pressure (Ptot) and the molar ratio of Li to Al (RLi/Al) on the morphology and deposition rates were investigated. The typical morphology of single-phase γ-LiAlO2 films prepared at RLi/Al > 1.0 and Ptot 400 Pa was granular, whereas γ-LiAlO2 films prepared at Ptot < 200 Pa and γ-LiAlO2-α-LiAl5O8 composite films had pyramidal grains. Single-phase α-LiAl5O8 films showed polygonally faceted morphologies. Composite films of α-LiAl 5O8 and α- Al2O3 consisted of carifllower-like and faceted grains. A single-phase γ-LiAlO2 film deposited at 200 Pa showed the maximum deposition rate of 48 □m h -1.

KW - Chemical vapor deposition

KW - Morphology

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T3 - Key Engineering Materials

SP - 223

EP - 226

BT - Advanced Ceramics and Novel Processing

PB - Trans Tech Publications Ltd

T2 - 5th International Symposium on Advanced Ceramics, ISAC 2013 and 3rd International Symposium on Advanced Synthesis and Processing Technology for Materials, ASPT 2013

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