Microstructure of interface for high-adhesion DLC film on metal substrates by plasma-based ion implantation

Mitsuyasu Yatsuzuka, Yoshihiro Oka, Masahiko Nishijima, Kenji Hiraga

Research output: Contribution to journalArticlepeer-review

21 Citations (Scopus)

Abstract

The diamond-like carbon (DLC) film was prepared on various metal substrates with a plasma-based ion implantation and deposition using superimposed RF and negative high-voltage pulses. The adhesion strength of DLC film was enhanced above the epoxy resin strength by implantation of carbon ions or mixed ions of carbon and silicon to the substrate surface before DLC deposition. In order to clarify the mechanism for improvement in adhesive strength, the microstructure of an interface between DLC film and substrate was examined in detail by transmission electron microscopy (TEM) observations in combination with EDS analysis. As a result, the enhancement in adhesion strength of DLC film by C ion implantation resulted from the formation of amorphous-like phase in the ion-implanted region of substrate, the production of carbon-component graded interface, the destruction of the oxide layer on the top surface of substrate, and the reduction of residual stress in DLC film by ion implantation during the deposition. The production of stress-free DLC film allowed us to demonstrate a supra-thick DLC film of more than 400 μm in thickness.

Original languageEnglish
Pages (from-to)190-197
Number of pages8
JournalVacuum
Volume83
Issue number1
DOIs
Publication statusPublished - 2008 Sep 4

Keywords

  • Diamond-like carbon (DLC)
  • High-adhesion
  • Microstructure
  • Nano-interface
  • Plasma-based ion implantation and deposition (PBIID)
  • Stress-free DLC
  • Supra-thick film
  • TEM observation

ASJC Scopus subject areas

  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films

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