Microstructure modification of yttria-stabilized zirconia layers prepared by EB-PVD

Norio Yamaguchi, Kunihiko Wada, Kazushige Kimura, Hideaki Matsubara

Research output: Contribution to journalArticlepeer-review

35 Citations (Scopus)


Microstructures and texture of yttria-stabilized zirconia (YSZ) layers prepared by electron beam physical vapor deposition (EB-PVD) were investigated, addressing the effect of processing parameters. All the YSZ layers investigated in this study showed a columnar structure. However, significant differences were found in their microstructures. Morphology, porosity, and texture of the layers changed drastically by substrate manipulation during deposition. Without rotation, the layer showed a dense columnar structure with less intercolumnar gaps and obscure feather-like structures, and no preferred growth orientation. Rotation was very effective in developing feather-like structures within each column and hence increasing porosity. In addition, substrate rotation caused strong (100) texture. These results are attributed to the flux shadowing effect induced by oblique vapor incidence caused by substrate manipulation. The influence of electron beam power and substrate temperature was also investigated.

Original languageEnglish
Pages (from-to)883-889
Number of pages7
JournalJournal of the Ceramic Society of Japan
Issue number1300
Publication statusPublished - 2003 Dec


  • Columnar structure
  • EB-PVD
  • Thermal barrier coating
  • Zirconia

ASJC Scopus subject areas

  • Ceramics and Composites
  • Chemistry(all)
  • Condensed Matter Physics
  • Materials Chemistry


Dive into the research topics of 'Microstructure modification of yttria-stabilized zirconia layers prepared by EB-PVD'. Together they form a unique fingerprint.

Cite this