Microstructure Control of CVD-Ceramic Film

Toshio Hirai, Hisanori Yamane

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)559-605
Number of pages47
JournalShinku/Journal of the Vacuum Society of Japan
Volume30
Issue number7
DOIs
Publication statusPublished - 1987 Jan

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

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