Microstructure Control of CVD-Ceramic Film

Toshio Hirai, Hisanori Yamane

    Research output: Contribution to journalArticlepeer-review

    Original languageEnglish
    Pages (from-to)559-605
    Number of pages47
    JournalShinku/Journal of the Vacuum Society of Japan
    Volume30
    Issue number7
    DOIs
    Publication statusPublished - 1987 Jan

    ASJC Scopus subject areas

    • Condensed Matter Physics
    • Surfaces, Coatings and Films
    • Electrical and Electronic Engineering

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