Abstract
The structural modification of pure DLC films was attempted by the addition of Si-O structures into the DLC films. The chemical structures of SiOx/DLC films were investigated by FT-IR, XPS and Raman spectrometer and the microstructure by TEM. The SiOx/DLC films composing of two amorphous materials showed that amorphous silica were independently interconnected with amorphous hydrocarbon. The mechanical properties of SiOx/DLC films deposited at different bias voltages were discussed in terms of Raman parameters. The friction coefficient of SiOx/DLC films was obtained under the different applied loads and environmental conditions. The frictional behavior of SiOx/DLC films deposited at different bias voltages was investigated.
Original language | English |
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Pages (from-to) | 128-135 |
Number of pages | 8 |
Journal | Surface and Coatings Technology |
Volume | 194 |
Issue number | 1 |
DOIs | |
Publication status | Published - 2005 Apr 20 |
Keywords
- Amorphous materials
- Friction coefficient
- Hardness
- SiO/DLC
ASJC Scopus subject areas
- Chemistry(all)
- Condensed Matter Physics
- Surfaces and Interfaces
- Surfaces, Coatings and Films
- Materials Chemistry