Microstructure and Electrical Properties of Ir-C Composite Films Prepared by MOCVD

Takashi Goto, Takashi Ono, Toshio Hirai

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)


Iridium-carbon composite films were prepared by metalloorganic chemical vapor deposition (MOCVD) on yttria stabilized zirconia (YSZ) substrates using an iridium acetylacetonate precursor. The films prepared without oxygen gas addition were black-colored and contained 35 to 70vol% carbon. The carbon was amorphous surrounding iridium grains of 1 to 3 nm in diameter. The Ir-C films showed excellent electrical and catalytic properties for YSZ as a reversible electrode at less than 800K. The impedance associated with the YSZ/Ir-C interface was about 1/3 to 1/5 smaller than that of sputtered Pt electrodes at 773K. By adding a small amount of oxygen gas in the source gases, the carbon content in the films decreased significantly accompanying grain growth of Ir and degradation of electrical performance. The output current using the Ir films containing a trace of carbon (about 1mass%C) as electrodes was still four times greater than that using the Pt electrodes at 773K.

Original languageEnglish
Pages (from-to)20-24
Number of pages5
JournalFuntai Oyobi Fummatsu Yakin/Journal of the Japan Society of Powder and Powder Metallurgy
Issue number1
Publication statusPublished - 1998 Jan


  • Carbon content
  • Electrode
  • Iridium-carbon composite film
  • Metalorganic chemical vapor deposition
  • Zirconia solid electrolyte

ASJC Scopus subject areas

  • Mechanical Engineering
  • Industrial and Manufacturing Engineering
  • Metals and Alloys
  • Materials Chemistry


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