Microstructure and electrical conductivity of epitaxial SrRuO3 thin films prepared on (001), (110) and (111) SrTiO3 substrates by laser ablation

Akihiko Ito, Hiroshi Masumoto, Takashi Goto

Research output: Contribution to journalArticlepeer-review

13 Citations (Scopus)


Epitaxial SrRuO3 (SRO) thin films were prepared on SrTiO 3 (STO) single-crystal substrates by laser ablation, and their microstructures and anisotropy of electrical conductivity were investigated. (001), (110) and (111) oriented SRO thin films were grown epitaxially on (001), (110) and (111) STO substrates at oxygen pressure of 13Pa and substrate temperature of 973K, respectively. Epitaxial (001) and (111) SRO thin films showed flat and smooth surface with a terrace and step structure whereas (110) SRO thin film had a faceted island-like structure. The in-plain orientation relationships of [100] SRO // [100] STO in (001) SRO/(001) STO thin films, [001] SRO // [001] STO in (110) SRO/110) STO thin films and [1̄1̄2] SRO // [1̄1̄2] STO in (111) SRO/(111) STO thin films were identified. Epitaxial (001) SRO thin films exhibited the highest electrical conductivity of 2.4 × 105 S-m-1 among the (001), (110) and (111) SRO thin films.

Original languageEnglish
Pages (from-to)227-233
Number of pages7
JournalMaterials Transactions
Issue number2
Publication statusPublished - 2007 Feb


  • Conductive oxide
  • Electrical conductivity
  • Epitaxial growth
  • Laser ablation
  • Microstructure
  • Strontium ruthenate
  • Thin films

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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