Microstructure and dielectric response of (111)-oriented tetragonal BaTiO3 thick films prepared by laser chemical vapor deposition

Dongyun Guo, Akihiko Ito, Rong Tu, Takashi Goto

Research output: Contribution to journalArticlepeer-review

22 Citations (Scopus)


(111)-oriented barium titanate (BaTiO3) thick films were prepared on Pt-coated Si substrates by laser chemical vapor deposition. The effects of deposition temperature on the orientation, microstructure, and dielectric response of the BaTiO3 films were investigated. BaTiO3 films exhibited a significant (111) orientation at deposition temperatures from 930 to 1010K. With increasing deposition temperature from 875 to 1010K, the surface microstructure changed from cauliflower-like to columnar structures with pyramidal caps. The permittivity of a (111)-oriented tetragonal BaTiO3 film prepared at 980K was 1890 at room temperature and 2600 at the Curie temperature of the film (395K).

Original languageEnglish
Pages (from-to)197-201
Number of pages5
JournalJournal of Asian Ceramic Societies
Issue number2
Publication statusPublished - 2013 Jun


  • Dielectric response
  • High-speed deposition
  • Laser CVD
  • Orientation

ASJC Scopus subject areas

  • Ceramics and Composites

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