Abstract
(111)-oriented barium titanate (BaTiO3) thick films were prepared on Pt-coated Si substrates by laser chemical vapor deposition. The effects of deposition temperature on the orientation, microstructure, and dielectric response of the BaTiO3 films were investigated. BaTiO3 films exhibited a significant (111) orientation at deposition temperatures from 930 to 1010K. With increasing deposition temperature from 875 to 1010K, the surface microstructure changed from cauliflower-like to columnar structures with pyramidal caps. The permittivity of a (111)-oriented tetragonal BaTiO3 film prepared at 980K was 1890 at room temperature and 2600 at the Curie temperature of the film (395K).
Original language | English |
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Pages (from-to) | 197-201 |
Number of pages | 5 |
Journal | Journal of Asian Ceramic Societies |
Volume | 1 |
Issue number | 2 |
DOIs | |
Publication status | Published - 2013 Jun |
Keywords
- Dielectric response
- High-speed deposition
- Laser CVD
- Orientation
ASJC Scopus subject areas
- Ceramics and Composites