Microstructure and composition of Au/Si3N4 model interface

Hiroshi Suzuki; Kyoko Yonemitsu; Tomohiro Saito; Yuichi Ikuhara

doi:10.2109/jcersj.107.1193

Microstructure and composition of Au/Si₃N₄ model interface

Hiroshi Suzuki, Kyoko Yonemitsu, Tomohiro Saito, Yuichi Ikuhara

Research output: Contribution to journal › Article › peer-review

Abstract

An Au/Si₃N₄ interface was obtained by vapor deposition of Au on a Si₃N₄ substrate in vacuum, both at room temperature and 600°C. The interface structure and chemical composition were investigated by high resolution and analytical electron microscopy. A damaged phase was observed between Au and Si₃N₄ crystals. The thickness of this phase increased when the substrate surface was polished or the substrate was heated. This phase was found to be amorphous and merely composed of Si and N.

Original language	English
Pages (from-to)	1193-1195
Number of pages	3
Journal	Journal of the Ceramic Society of Japan
Volume	107
Issue number	12
DOIs	https://doi.org/10.2109/jcersj.107.1193
Publication status	Published - 1999

Keywords

Gold
High resolution electron microscopy
Interface structure
Silicon nitride

ASJC Scopus subject areas

Ceramics and Composites
Chemistry(all)
Condensed Matter Physics
Materials Chemistry

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title = "Microstructure and composition of Au/Si3N4 model interface",

abstract = "An Au/Si3N4 interface was obtained by vapor deposition of Au on a Si3N4 substrate in vacuum, both at room temperature and 600°C. The interface structure and chemical composition were investigated by high resolution and analytical electron microscopy. A damaged phase was observed between Au and Si3N4 crystals. The thickness of this phase increased when the substrate surface was polished or the substrate was heated. This phase was found to be amorphous and merely composed of Si and N.",

keywords = "Gold, High resolution electron microscopy, Interface structure, Silicon nitride",

author = "Hiroshi Suzuki and Kyoko Yonemitsu and Tomohiro Saito and Yuichi Ikuhara",

year = "1999",

doi = "10.2109/jcersj.107.1193",

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journal = "Nippon Seramikkusu Kyokai Gakujutsu Ronbunshi/Journal of the Ceramic Society of Japan",

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AU - Suzuki, Hiroshi

AU - Yonemitsu, Kyoko

AU - Saito, Tomohiro

AU - Ikuhara, Yuichi

PY - 1999

Y1 - 1999

N2 - An Au/Si3N4 interface was obtained by vapor deposition of Au on a Si3N4 substrate in vacuum, both at room temperature and 600°C. The interface structure and chemical composition were investigated by high resolution and analytical electron microscopy. A damaged phase was observed between Au and Si3N4 crystals. The thickness of this phase increased when the substrate surface was polished or the substrate was heated. This phase was found to be amorphous and merely composed of Si and N.

AB - An Au/Si3N4 interface was obtained by vapor deposition of Au on a Si3N4 substrate in vacuum, both at room temperature and 600°C. The interface structure and chemical composition were investigated by high resolution and analytical electron microscopy. A damaged phase was observed between Au and Si3N4 crystals. The thickness of this phase increased when the substrate surface was polished or the substrate was heated. This phase was found to be amorphous and merely composed of Si and N.

KW - Gold

KW - High resolution electron microscopy

KW - Interface structure

KW - Silicon nitride

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