Microstructural analysis of the deformation range under nano-indentation in β-SiC

Chemistry

• Dislocation 100%
• Procedure 66%
• Silicon Ion 66%
• Ion 33%
• Irradiation 33%
• Application 33%
• Sampling 33%
• Flexibility 33%
• Foil 33%

Physics

• Nanoindentation 66%
• Deformation 33%
• Radiation Effect 33%
• Defects 33%
• Area 33%
• Utilization 33%
• Flexibility 33%
• Radiation 33%
• Sampling 33%
• Position (Location) 33%

Material Science

• Focused Ion Beam 66%
• Indentation Hardness Testing 33%
• Microstructural Evolution 33%
• Microstructural Analysis 33%
• Irradiation 33%
• Defect 33%
• Metal Foil 33%