Microstructural analysis of damaged layer introduced during chemo-mechanical polishing

Hideki Sako, Tamotsu Yamashita, Kentaro Tamura, Masayuki Sasaki, Masatake Nagaya, Takanori Kido, Kenji Kawata, Tomohisa Kato, Kazutoshi Kojima, Susumu Tsukimoto, Hirofumi Matsuhata, Makoto Kitabatake

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    14 Citations (Scopus)

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    Chemical Compounds

    Engineering & Materials Science

    Physics & Astronomy