Abstract
An axisymmetric Wolter type mirror is used in a synchrotron radiation beamline to focus 150 eV soft x rays for microscopic x-ray photoelectron spectroscopy (XPS). The focusing characteristics are evaluated for x-ray source sizes of 1 mm, 200 and 120 μ m in diameter. In this evaluation, the Si(2p) photoelectrons from a Si sample are counted while a knife edge is scanned across the focal point of the mirror. The lateral resolution is 2 μm by the 25%-75% criterion, and 4μm by the full width at half-maximum definition in the beam intensity profile. The Wolter type mirror is expected to provide microscopic XPS techniques with micrometer to sub-micrometer resolution.
| Original language | English |
|---|---|
| Pages (from-to) | 1244-1247 |
| Number of pages | 4 |
| Journal | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films |
| Volume | 9 |
| Issue number | 3 |
| DOIs | |
| Publication status | Published - 1991 Jan 1 |
| Externally published | Yes |
ASJC Scopus subject areas
- Condensed Matter Physics
- Surfaces and Interfaces
- Surfaces, Coatings and Films