Microscopic observation of the temperature coefficient distribution of microwave materials using scanning electron-beam dielectric microscopy

Y. Cho, A. Satoh, H. Odagawa

Research output: Contribution to journalArticlepeer-review

Abstract

Studies on scanning electron-beam dielectric microscopy (SEDM) are reported. This microscopy technique is used for determining the temperature coefficient distribution of dielectric materials using an electron-beam as a heat source. This microscopy technique, which has the ability to simultaneously observe SEM images and the material composition by EPMA, has a resolution better than that of photothermal dielectric microscopy. To demonstrate the usefulness of this technique, the two-dimensional image of a two-phase composite ceramic is measured. To shorten a measurement time, a new type of SEDM for measuring the real time transient response caused by a single pulsed electron-beam is also successfully developed.

Original languageEnglish
Pages (from-to)2735-2738
Number of pages4
JournalJournal of the European Ceramic Society
Volume21
Issue number15
DOIs
Publication statusPublished - 2001

Keywords

  • Capacitors
  • Dielectric properties
  • Dielectric temperature coefficient
  • Electron microscopy

ASJC Scopus subject areas

  • Ceramics and Composites
  • Materials Chemistry

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