Microscopic four-point atomic force microscope probe technique for local electrical conductivity measurement

Yang Ju, Bing Feng Ju, Masumi Saka

Research output: Contribution to journalArticle

26 Citations (Scopus)

Abstract

A micro-four-point probe technique for local electrical conductivity measurement is presented. An atomic force microscope (AFM) probe was fabricated into four parallel electrodes isolated from each other. Electrodes separated by a distance as small as 1.0 μm were used to perform the current and electrical potential measurements. This technique is a combination of the principles of the four-point probe method and standard AFM. The equipment is capable of simultaneously measuring both surface topography and local electrical conductivity. Experiments show the microprobe to be mechanically flexible and robust. The repeatable conductivity measurement on the submicron surface of thin aluminum and indium tin oxide films demonstrates the capability of the equipment and its possible extension to characterize microdevices and samples.

Original languageEnglish
Article number086101
Pages (from-to)1-3
Number of pages3
JournalReview of Scientific Instruments
Volume76
Issue number8
DOIs
Publication statusPublished - 2005 Aug 1

ASJC Scopus subject areas

  • Instrumentation

Fingerprint Dive into the research topics of 'Microscopic four-point atomic force microscope probe technique for local electrical conductivity measurement'. Together they form a unique fingerprint.

  • Cite this