Microprocesses and nanotechnology

Masao Nagase, Seiji Akita, Yasuaki Ishikawa, Reo Kometani, Daiyu Kondo, Seiji Nagahara, Takahiro Namazu, Takeo Ohno, Shozo Shingubara, Seiichi Takami, Koichi Takase, Masaaki Tanemura, Keiko Tawa, Kazuya Terabe, Toshiyuki Tsuchiya, Takeshi Yanagida, Atsushi Yokoo

Research output: Contribution to journalEditorial

Original languageEnglish
Article number06G001
JournalJapanese journal of applied physics
Volume55
Issue number6
DOIs
Publication statusPublished - 2016 Jun

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

Cite this

Nagase, M., Akita, S., Ishikawa, Y., Kometani, R., Kondo, D., Nagahara, S., Namazu, T., Ohno, T., Shingubara, S., Takami, S., Takase, K., Tanemura, M., Tawa, K., Terabe, K., Tsuchiya, T., Yanagida, T., & Yokoo, A. (2016). Microprocesses and nanotechnology. Japanese journal of applied physics, 55(6), [06G001]. https://doi.org/10.7567/JJAP.55.06G001