Microprobe integrated with single-electron transistor for magnetic resonance force microscopy

Suk Ho Song, Takahito Ono, Masayoshi Esashi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In this paper, a novel probe with an integrated radio frequency single-electron transistor (rf-SET) for magnetic resonance force microscopy operated at low temperatures is proposed and fabricated. By using the charge sensitivity of the rf-SET, the displacement of a cantilever can be detected from the capacitance variation between the quantum island and the gate formed on the cantilever with high sensitivity. The rf-SET using a Cr thin film isolated with tunneling junction of a thin silicon dioxide film was fabricated on the basis of electron beam lithography and self-aligned island formation.

Original languageEnglish
Title of host publicationTRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems
Pages1749-1752
Number of pages4
DOIs
Publication statusPublished - 2007 Dec 1
Event4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07 - Lyon, France
Duration: 2007 Jun 102007 Jun 14

Publication series

NameTRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems

Other

Other4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07
Country/TerritoryFrance
CityLyon
Period07/6/1007/6/14

Keywords

  • Displacement sensor
  • Magnetic resonance force microscopy (MRFM)
  • Single electron transistor (SET)
  • Thermomechanical noise

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

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