Micropatterning of photosensitive sol-gel film containing double-decker-shaped silsesquioxan

Akira Watanabe, Tokuji Miyashita

Research output: Contribution to conferencePaper

Abstract

The double-decker-shaped silsesquioxane (DDSQ) is a multifunctional silsesquioxane with a wide variety of functional groups. The micropatterning of an organic-inorganic hybrid film consisting of DDSQ silanol (DDOH) which has an open-cage structure with four silanol and eight phenyl groups was achieved using a photosensitive sol-gel system containing a titanium alkoxide modified with β-diketone. Negative patterns with a high-resolution of ca. 1 μm were obtained by UV-irradiation. The micropatetrning can be also achieved by laser-direct drawing using the 248.6-nm line of a Ne-Cu laser, where the laser beam was focused on a DDOH/titanium alkoxide/β-diketone hybrid film using an objective lens and the focal point was scanned by a computer-controlled xyz stage. The hybridization method using metal complexes with β-diketonates also made it possible to incorporate various kinds of metals into silsesquioxane hybrid film and to modify the properties.

Original languageEnglish
Pages3298-3299
Number of pages2
Publication statusPublished - 2006 Dec 1
Event55th Society of Polymer Science Japan Symposium on Macromolecules - Toyama, Japan
Duration: 2006 Sep 202006 Sep 22

Other

Other55th Society of Polymer Science Japan Symposium on Macromolecules
CountryJapan
CityToyama
Period06/9/2006/9/22

Keywords

  • Micropatterning
  • Organic-inorganic hybrid
  • Silsesquioxane

ASJC Scopus subject areas

  • Engineering(all)

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  • Cite this

    Watanabe, A., & Miyashita, T. (2006). Micropatterning of photosensitive sol-gel film containing double-decker-shaped silsesquioxan. 3298-3299. Paper presented at 55th Society of Polymer Science Japan Symposium on Macromolecules, Toyama, Japan.