Micropatterning of organic-inorganic hybrid film using photosensitive sol-gel system consisting of double-decker-shaped multifunctional silsesquioxane

Akira Watanabe; Tokuji Miyashita

doi:10.1246/cl.2006.1130

Micropatterning of organic-inorganic hybrid film using photosensitive sol-gel system consisting of double-decker-shaped multifunctional silsesquioxane

Akira Watanabe, Tokuji Miyashita

Division of Process and System Engineering

Research output: Contribution to journal › Article › peer-review

17 Citations (Scopus)

Abstract

The micropatterning of an organic-inorganic hybrid film consisting of a double-decker-shaped multifunctional silses-quioxane was achieved using a photosensitive sol-gel system containing a titanium alkoxide modified with β-diketone. Negative patterns with a high-resolution of ca. 1 μm were obtained by UV-irradiation.

Original language	English
Pages (from-to)	1130-1131
Number of pages	2
Journal	Chemistry Letters
Volume	35
Issue number	10
DOIs	https://doi.org/10.1246/cl.2006.1130
Publication status	Published - 2006 Oct 5

ASJC Scopus subject areas

Chemistry(all)

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10.1246/cl.2006.1130

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abstract = "The micropatterning of an organic-inorganic hybrid film consisting of a double-decker-shaped multifunctional silses-quioxane was achieved using a photosensitive sol-gel system containing a titanium alkoxide modified with β-diketone. Negative patterns with a high-resolution of ca. 1 μm were obtained by UV-irradiation.",

author = "Akira Watanabe and Tokuji Miyashita",

year = "2006",

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AU - Miyashita, Tokuji

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Y1 - 2006/10/5

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AB - The micropatterning of an organic-inorganic hybrid film consisting of a double-decker-shaped multifunctional silses-quioxane was achieved using a photosensitive sol-gel system containing a titanium alkoxide modified with β-diketone. Negative patterns with a high-resolution of ca. 1 μm were obtained by UV-irradiation.

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Micropatterning of organic-inorganic hybrid film using photosensitive sol-gel system consisting of double-decker-shaped multifunctional silsesquioxane

Abstract

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