Micropatterning of organic-inorganic hybrid film using photosensitive sol-gel system consisting of double-decker-shaped multifunctional silsesquioxane

Akira Watanabe, Tokuji Miyashita

Research output: Contribution to journalArticle

17 Citations (Scopus)

Abstract

The micropatterning of an organic-inorganic hybrid film consisting of a double-decker-shaped multifunctional silses-quioxane was achieved using a photosensitive sol-gel system containing a titanium alkoxide modified with β-diketone. Negative patterns with a high-resolution of ca. 1 μm were obtained by UV-irradiation.

Original languageEnglish
Pages (from-to)1130-1131
Number of pages2
JournalChemistry Letters
Volume35
Issue number10
DOIs
Publication statusPublished - 2006 Oct 5

ASJC Scopus subject areas

  • Chemistry(all)

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