Abstract
The micropatterning of an organic-inorganic hybrid film consisting of a double-decker-shaped multifunctional silses-quioxane was achieved using a photosensitive sol-gel system containing a titanium alkoxide modified with β-diketone. Negative patterns with a high-resolution of ca. 1 μm were obtained by UV-irradiation.
Original language | English |
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Pages (from-to) | 1130-1131 |
Number of pages | 2 |
Journal | Chemistry Letters |
Volume | 35 |
Issue number | 10 |
DOIs | |
Publication status | Published - 2006 Oct 5 |
ASJC Scopus subject areas
- Chemistry(all)