Micropatterning of organic-inorganic hybrid film using photosensitive sol-gel system consisting of double-decker-shaped multifunctional silsesquioxane

Akira Watanabe; Tokuji Miyashita

doi:10.1246/cl.2006.1130

Micropatterning of organic-inorganic hybrid film using photosensitive sol-gel system consisting of double-decker-shaped multifunctional silsesquioxane

Akira Watanabe, Tokuji Miyashita

Center for Mineral Processing and Metallurgy (CMPM)

Research output: Contribution to journal › Article

17 Citations (Scopus)

Abstract

The micropatterning of an organic-inorganic hybrid film consisting of a double-decker-shaped multifunctional silses-quioxane was achieved using a photosensitive sol-gel system containing a titanium alkoxide modified with β-diketone. Negative patterns with a high-resolution of ca. 1 μm were obtained by UV-irradiation.

Original language	English
Pages (from-to)	1130-1131
Number of pages	2
Journal	Chemistry Letters
Volume	35
Issue number	10
DOIs	https://doi.org/10.1246/cl.2006.1130
Publication status	Published - 2006 Oct 5

ASJC Scopus subject areas

Chemistry(all)

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Watanabe, A., & Miyashita, T. (2006). Micropatterning of organic-inorganic hybrid film using photosensitive sol-gel system consisting of double-decker-shaped multifunctional silsesquioxane. Chemistry Letters, 35(10), 1130-1131. https://doi.org/10.1246/cl.2006.1130

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