Micropatterning of inorganic film by laser-induced pyrolysis using organometallic precursor

Akira Watanabe, Tomokazu Tanase, Yoshio Kobayashi, Mikio Konno, Shinji Yamada, Takao Miwa

Research output: Contribution to journalConference articlepeer-review

6 Citations (Scopus)

Abstract

A novel low-temperature processing of crystalline lead zirconate titanate (PZT) micropatterns by applying the laser-induced pyrolysis (LIP) method to the sol-gel derived PZT precursor film was studied. One of the factors on which the PZT micropattern depends is the spot size of the focused laser beam. Low temperature crystallization and micropatterning of a PZT film were achieved by LIP method using a sol-gel derived precursor film. It was expected that the application of LIP method to various sol-gel systems can develop the low temperature processing of the crystalline micropatterns.

Original languageEnglish
Article numberM11.8
Pages (from-to)183-185
Number of pages3
JournalMaterials Research Society Symposium Proceedings
VolumeEXS
Issue number2
Publication statusPublished - 2004 Dec 1
Event2003 MRS Fall Meeting - Boston, MA, United States
Duration: 2003 Dec 12003 Dec 5

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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