Micropatterning and crystallization of sol-gel-derived dielectric film by laser direct writing

Akira Watanabe, Tomokazu Tanase, Kenji Miyajima, Yoshio Kobayashi, Mikio Konno

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

Low temperature crystallization and the micropatterning of lead zirconate titanate (PZT) film were achieved by laser direct writing method using a sol-gel derived precursor film. After scanning of an Ar ion laser beam through an objective lens, the etching of the unirradiated area of the precursor film with an acidic solution gave micropatterns with a resolution of several μm. The formation of crystalline micropatterns was confirmed by micro-Raman spectroscopy. The laser direct writing method provides a low-temperature processing of crystalline PZT film while the crystallization of PZT needs the heat treatment above 600°C in the case of convenient methods. The influences of the power density of the laser beam were investigated. With increasing the laser power density, the change from tetragonal to rombohedral phase was observed. The micropattern with tetragonal phase showed residual carbon. The carbon contamination could be removed by heat treatment in air. The direct laser writing of crystalline barium titanate (BT) film was also successfully performed using sol-gel derived BT films containing BT nano-crystalline seeds. The dielectric constant of the crystalline BT micropatterns reached 76.2 at 100 kHz.

Original languageEnglish
Title of host publicationLaser-based Micro- and Nanopackaging and Assembly IV
DOIs
Publication statusPublished - 2010 May 7
EventLaser-based Micro- and Nanopackaging and Assembly IV - San Francisco, CA, United States
Duration: 2010 Jan 262010 Jan 28

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume7585
ISSN (Print)0277-786X

Other

OtherLaser-based Micro- and Nanopackaging and Assembly IV
CountryUnited States
CitySan Francisco, CA
Period10/1/2610/1/28

Keywords

  • Barium titanate
  • Crystallization
  • Laser direct writing
  • Lead zirconate titanate
  • Metal nano-particle ink
  • Micro-Raman spectroscopy
  • Micropatterning
  • Sol-gel process

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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