Micromirror with two parallel rotation axes for external cavity diode laser

Masahiro Ishimori; Minoru Sasaki; Kazuhiro Hane

doi:10.1093/ietele/e90-c.1.72

Micromirror with two parallel rotation axes for external cavity diode laser

Masahiro Ishimori, Minoru Sasaki, Kazuhiro Hane

ENG - Finemechanics

Research output: Contribution to journal › Article › peer-review

3 Citations (Scopus)

Abstract

A micromirror for an external cavity diode laser is described. The mirror is supported by two sets of parallel torsion bars enabling piston motion as well as rotation. These motions are for realizing continuous wavelength tuning. Adjusting two rotations electrically, the pivot of the mirror rotation can be controlled. The long stroke of the vertical comb is realized by the deep three-dimensional structure prepared by the wafer bending method.

Original language	English
Pages (from-to)	72-76
Number of pages	5
Journal	IEICE Transactions on Electronics
Volume	E90-C
Issue number	1
DOIs	https://doi.org/10.1093/ietele/e90-c.1.72
Publication status	Published - 2007 Jan

Keywords

Littman configuration
Micromirror
Tunable laser diode
Vertical comb drive
Wafer bending

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Electrical and Electronic Engineering

Access to Document

10.1093/ietele/e90-c.1.72

Fingerprint Dive into the research topics of 'Micromirror with two parallel rotation axes for external cavity diode laser'. Together they form a unique fingerprint.

Cite this

@article{953625b4c3ea4bf3bed80c8f9ddb66fe,

title = "Micromirror with two parallel rotation axes for external cavity diode laser",

abstract = "A micromirror for an external cavity diode laser is described. The mirror is supported by two sets of parallel torsion bars enabling piston motion as well as rotation. These motions are for realizing continuous wavelength tuning. Adjusting two rotations electrically, the pivot of the mirror rotation can be controlled. The long stroke of the vertical comb is realized by the deep three-dimensional structure prepared by the wafer bending method.",

keywords = "Littman configuration, Micromirror, Tunable laser diode, Vertical comb drive, Wafer bending",

author = "Masahiro Ishimori and Minoru Sasaki and Kazuhiro Hane",

year = "2007",

month = jan,

doi = "10.1093/ietele/e90-c.1.72",

language = "English",

volume = "E90-C",

pages = "72--76",

journal = "IEICE Transactions on Electronics",

issn = "0916-8524",

publisher = "Maruzen Co., Ltd/Maruzen Kabushikikaisha",

number = "1",

}

TY - JOUR

T1 - Micromirror with two parallel rotation axes for external cavity diode laser

AU - Ishimori, Masahiro

AU - Sasaki, Minoru

AU - Hane, Kazuhiro

PY - 2007/1

Y1 - 2007/1

N2 - A micromirror for an external cavity diode laser is described. The mirror is supported by two sets of parallel torsion bars enabling piston motion as well as rotation. These motions are for realizing continuous wavelength tuning. Adjusting two rotations electrically, the pivot of the mirror rotation can be controlled. The long stroke of the vertical comb is realized by the deep three-dimensional structure prepared by the wafer bending method.

AB - A micromirror for an external cavity diode laser is described. The mirror is supported by two sets of parallel torsion bars enabling piston motion as well as rotation. These motions are for realizing continuous wavelength tuning. Adjusting two rotations electrically, the pivot of the mirror rotation can be controlled. The long stroke of the vertical comb is realized by the deep three-dimensional structure prepared by the wafer bending method.

KW - Littman configuration

KW - Micromirror

KW - Tunable laser diode

KW - Vertical comb drive

KW - Wafer bending

UR - http://www.scopus.com/inward/record.url?scp=33846408025&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=33846408025&partnerID=8YFLogxK

U2 - 10.1093/ietele/e90-c.1.72

DO - 10.1093/ietele/e90-c.1.72

M3 - Article

AN - SCOPUS:33846408025

VL - E90-C

SP - 72

EP - 76

JO - IEICE Transactions on Electronics

JF - IEICE Transactions on Electronics

SN - 0916-8524

IS - 1

ER -