Micromirror with two parallel rotation axes for external cavity diode laser

Masahiro Ishimori, Minoru Sasaki, Kazuhiro Hane

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)


A micromirror for an external cavity diode laser is described. The mirror is supported by two sets of parallel torsion bars enabling piston motion as well as rotation. These motions are for realizing continuous wavelength tuning. Adjusting two rotations electrically, the pivot of the mirror rotation can be controlled. The long stroke of the vertical comb is realized by the deep three-dimensional structure prepared by the wafer bending method.

Original languageEnglish
Pages (from-to)72-76
Number of pages5
JournalIEICE Transactions on Electronics
Issue number1
Publication statusPublished - 2007 Jan


  • Littman configuration
  • Micromirror
  • Tunable laser diode
  • Vertical comb drive
  • Wafer bending

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering


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