Micromirror with two parallel rotation axes for external cavity diode laser

Masahiro Ishimori; Minoru Sasaki; Kazuhiro Hane

doi:10.1093/ietele/e90-c.1.72

Micromirror with two parallel rotation axes for external cavity diode laser

Masahiro Ishimori, Minoru Sasaki, Kazuhiro Hane

New Industry Creation Hatchery Center (NICHe)

Research output: Contribution to journal › Article › peer-review

3 Citations (Scopus)

Abstract

A micromirror for an external cavity diode laser is described. The mirror is supported by two sets of parallel torsion bars enabling piston motion as well as rotation. These motions are for realizing continuous wavelength tuning. Adjusting two rotations electrically, the pivot of the mirror rotation can be controlled. The long stroke of the vertical comb is realized by the deep three-dimensional structure prepared by the wafer bending method.

Original language	English
Pages (from-to)	72-76
Number of pages	5
Journal	IEICE Transactions on Electronics
Volume	E90-C
Issue number	1
DOIs	https://doi.org/10.1093/ietele/e90-c.1.72
Publication status	Published - 2007 Jan

Keywords

Littman configuration
Micromirror
Tunable laser diode
Vertical comb drive
Wafer bending

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Electrical and Electronic Engineering

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10.1093/ietele/e90-c.1.72

Cite this

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abstract = "A micromirror for an external cavity diode laser is described. The mirror is supported by two sets of parallel torsion bars enabling piston motion as well as rotation. These motions are for realizing continuous wavelength tuning. Adjusting two rotations electrically, the pivot of the mirror rotation can be controlled. The long stroke of the vertical comb is realized by the deep three-dimensional structure prepared by the wafer bending method.",

keywords = "Littman configuration, Micromirror, Tunable laser diode, Vertical comb drive, Wafer bending",

author = "Masahiro Ishimori and Minoru Sasaki and Kazuhiro Hane",

year = "2007",

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doi = "10.1093/ietele/e90-c.1.72",

language = "English",

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pages = "72--76",

journal = "IEICE Transactions on Electronics",

issn = "0916-8524",

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AU - Ishimori, Masahiro

AU - Sasaki, Minoru

AU - Hane, Kazuhiro

PY - 2007/1

Y1 - 2007/1

N2 - A micromirror for an external cavity diode laser is described. The mirror is supported by two sets of parallel torsion bars enabling piston motion as well as rotation. These motions are for realizing continuous wavelength tuning. Adjusting two rotations electrically, the pivot of the mirror rotation can be controlled. The long stroke of the vertical comb is realized by the deep three-dimensional structure prepared by the wafer bending method.

AB - A micromirror for an external cavity diode laser is described. The mirror is supported by two sets of parallel torsion bars enabling piston motion as well as rotation. These motions are for realizing continuous wavelength tuning. Adjusting two rotations electrically, the pivot of the mirror rotation can be controlled. The long stroke of the vertical comb is realized by the deep three-dimensional structure prepared by the wafer bending method.

KW - Littman configuration

KW - Micromirror

KW - Tunable laser diode

KW - Vertical comb drive

KW - Wafer bending

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JF - IEICE Transactions on Electronics

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ER -

Micromirror with two parallel rotation axes for external cavity diode laser

Abstract

Keywords

ASJC Scopus subject areas

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