Micromirror with thin film torsion bar and vertical comb using tensile poly-si

Masayuki Fujishima, Minoru Sasaki, Kazuhiro Hane

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish
Title of host publicationIEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006
Pages108-109
Number of pages2
Publication statusPublished - 2006 Dec 1
EventIEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006 - Big Sky, MT, United States
Duration: 2006 Aug 212006 Aug 24

Publication series

NameIEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006

Other

OtherIEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006
CountryUnited States
CityBig Sky, MT
Period06/8/2106/8/24

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

Cite this

Fujishima, M., Sasaki, M., & Hane, K. (2006). Micromirror with thin film torsion bar and vertical comb using tensile poly-si. In IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006 (pp. 108-109). [1708288] (IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006).