Abstract
A piezoresistive rotation angle sensor is integrated in a micromirror device. The sensor detects the shear stress inside the torsion bar generated by the mirror rotation. The small sensor signal is successfully measured using the time-modulation method clearing the detailed performance of the sensor. The accuracy of 0.03 degrees is confirmed. The improved device design is illustrated.
| Original language | English |
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| Title of host publication | IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006 |
| Pages | 62-63 |
| Number of pages | 2 |
| Publication status | Published - 2006 Dec 1 |
| Event | IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006 - Big Sky, MT, United States Duration: 2006 Aug 21 → 2006 Aug 24 |
Other
| Other | IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006 |
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| Country | United States |
| City | Big Sky, MT |
| Period | 06/8/21 → 06/8/24 |
Keywords
- Micromirror
- Piezoresistive sensor
- Rotation angle sensor
- Shear gauge
- Time-modulation
ASJC Scopus subject areas
- Electrical and Electronic Engineering
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics