Micromirror integrated with piezoresistive rotation angle sensor for measuring small signal

Motoki Tabata, Minoru Sasaki, Kazuhiro Hane

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

A piezoresistive rotation angle sensor is integrated in a micromirror device. The sensor detects the shear stress inside the torsion bar generated by the mirror rotation. The small sensor signal is successfully measured using the time-modulation method clearing the detailed performance of the sensor. The accuracy of 0.03 degrees is confirmed. The improved device design is illustrated.

Original languageEnglish
Title of host publicationIEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006
Pages62-63
Number of pages2
Publication statusPublished - 2006 Dec 1
EventIEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006 - Big Sky, MT, United States
Duration: 2006 Aug 212006 Aug 24

Other

OtherIEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006
CountryUnited States
CityBig Sky, MT
Period06/8/2106/8/24

Keywords

  • Micromirror
  • Piezoresistive sensor
  • Rotation angle sensor
  • Shear gauge
  • Time-modulation

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

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