@article{f3fcac4098da44deb518120ff5926da4,
title = "Micromechanism-Innovation of Precision Engineering",
keywords = "intelligent sensor and actuator, microactuator, micromachining, micromechanics, microsensor, photolithography, semiconductor fabrication",
author = "Masayoshi Esashi",
year = "1988",
doi = "10.2493/jjspe.54.1625",
language = "English",
volume = "54",
pages = "1625--1629",
journal = "Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering",
issn = "0912-0289",
publisher = "Japan Society for Precision Engineering",
number = "9",
}