Micromechanism-Innovation of Precision Engineering

Masayoshi Esashi

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)1625-1629
Number of pages5
JournalJournal of the Japan Society for Precision Engineering
Volume54
Issue number9
DOIs
Publication statusPublished - 1988 Jan 1

Keywords

  • intelligent sensor and actuator
  • microactuator
  • micromachining
  • micromechanics
  • microsensor
  • photolithography
  • semiconductor fabrication

ASJC Scopus subject areas

  • Mechanical Engineering

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