Micromechanically-coupled resonated system for synchronized oscillation with improved phase noise

Dong F. Wang, Jinyang Feng, Takahito Ono, Masayoshi Esashi, Xiongying Ye

Research output: Chapter in Book/Report/Conference proceedingConference contribution

17 Citations (Scopus)

Abstract

Frequency enhancement with decreased fluctuation is available by using micromechanically-coupled synchronized resonator system. The system consists of two geometrically designed and empirically fabricated singly-clamped beam-shaped cantilevers (19.5 μm and 30 μm long x 5 μm wide x 100 nm thick). Two cantilevers, with resonant frequencies of 295.72 kHz (detecting) and 145.01 kHz (sensing) respectively, are coupled by a thin support as a mechanical element. The frequency response signal can thus be doubled with a decreased fluctuation when the detecting cantilever is synchronized with the sensing one. A reformed micromechanically-coupled resonator system is further designed using Coventor Ware™ software and vibration modes are simulated for next application study.

Original languageEnglish
Title of host publicationMEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest
Pages703-706
Number of pages4
DOIs
Publication statusPublished - 2010
Event23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010 - Hong Kong, China
Duration: 2010 Jan 242010 Jan 28

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)1084-6999

Other

Other23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010
CountryChina
CityHong Kong
Period10/1/2410/1/28

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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