Micromechanically-coupled resonated system for synchronized oscillation with improved phase noise

Dong F. Wang; Jinyang Feng; Takahito Ono; Masayoshi Esashi; Xiongying Ye

doi:10.1109/MEMSYS.2010.5442309

Micromechanically-coupled resonated system for synchronized oscillation with improved phase noise

Dong F. Wang, Jinyang Feng, Takahito Ono, Masayoshi Esashi, Xiongying Ye

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

17 Citations (Scopus)

Abstract

Frequency enhancement with decreased fluctuation is available by using micromechanically-coupled synchronized resonator system. The system consists of two geometrically designed and empirically fabricated singly-clamped beam-shaped cantilevers (19.5 μm and 30 μm long x 5 μm wide x 100 nm thick). Two cantilevers, with resonant frequencies of 295.72 kHz (detecting) and 145.01 kHz (sensing) respectively, are coupled by a thin support as a mechanical element. The frequency response signal can thus be doubled with a decreased fluctuation when the detecting cantilever is synchronized with the sensing one. A reformed micromechanically-coupled resonator system is further designed using Coventor Ware™ software and vibration modes are simulated for next application study.

Original language	English
Title of host publication	MEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest
Pages	703-706
Number of pages	4
DOIs	https://doi.org/10.1109/MEMSYS.2010.5442309
Publication status	Published - 2010
Event	23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010 - Hong Kong, China Duration: 2010 Jan 24 → 2010 Jan 28

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)	1084-6999

Other

Other	23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010
Country/Territory	China
City	Hong Kong
Period	10/1/24 → 10/1/28

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

Access to Document

10.1109/MEMSYS.2010.5442309

Cite this

Wang, D. F., Feng, J., Ono, T., Esashi, M., & Ye, X. (2010). Micromechanically-coupled resonated system for synchronized oscillation with improved phase noise. In MEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest (pp. 703-706). [5442309] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/MEMSYS.2010.5442309

Micromechanically-coupled resonated system for synchronized oscillation with improved phase noise. / Wang, Dong F.; Feng, Jinyang; Ono, Takahito et al.

MEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest. 2010. p. 703-706 5442309 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Wang, DF, Feng, J, Ono, T, Esashi, M & Ye, X 2010, Micromechanically-coupled resonated system for synchronized oscillation with improved phase noise. in MEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest., 5442309, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 703-706, 23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010, Hong Kong, China, 10/1/24. https://doi.org/10.1109/MEMSYS.2010.5442309

Wang DF, Feng J, Ono T, Esashi M, Ye X. Micromechanically-coupled resonated system for synchronized oscillation with improved phase noise. In MEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest. 2010. p. 703-706. 5442309. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMSYS.2010.5442309

Wang, Dong F. ; Feng, Jinyang ; Ono, Takahito et al. / Micromechanically-coupled resonated system for synchronized oscillation with improved phase noise. MEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest. 2010. pp. 703-706 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

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abstract = "Frequency enhancement with decreased fluctuation is available by using micromechanically-coupled synchronized resonator system. The system consists of two geometrically designed and empirically fabricated singly-clamped beam-shaped cantilevers (19.5 μm and 30 μm long x 5 μm wide x 100 nm thick). Two cantilevers, with resonant frequencies of 295.72 kHz (detecting) and 145.01 kHz (sensing) respectively, are coupled by a thin support as a mechanical element. The frequency response signal can thus be doubled with a decreased fluctuation when the detecting cantilever is synchronized with the sensing one. A reformed micromechanically-coupled resonator system is further designed using Coventor Ware{\texttrademark} software and vibration modes are simulated for next application study.",

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AB - Frequency enhancement with decreased fluctuation is available by using micromechanically-coupled synchronized resonator system. The system consists of two geometrically designed and empirically fabricated singly-clamped beam-shaped cantilevers (19.5 μm and 30 μm long x 5 μm wide x 100 nm thick). Two cantilevers, with resonant frequencies of 295.72 kHz (detecting) and 145.01 kHz (sensing) respectively, are coupled by a thin support as a mechanical element. The frequency response signal can thus be doubled with a decreased fluctuation when the detecting cantilever is synchronized with the sensing one. A reformed micromechanically-coupled resonator system is further designed using Coventor Ware™ software and vibration modes are simulated for next application study.

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Micromechanically-coupled resonated system for synchronized oscillation with improved phase noise

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