Micromechanical force sensor using the stress–impedance effect of soft magnetic fecunbsib

Joerg Froemel, Gildas Diguet, Masanori Muroyama

Research output: Contribution to journalArticlepeer-review

Abstract

By using the stress–impedance (SI) effect of a soft magnetic amorphous FeCuNbSiB alloy, a micromachined force sensor was fabricated and characterized. The alloy was used as a sputtered thin film of 500 nm thickness. To clarify the SI effect in the used material as a thin film, its magnetic and mechanical properties were first investigated. The stress dependence of the magnetic permeability was shown to be caused by the used transducer effect. The sputtered thin film also exhibited a large yield strength of 983 GPa. Even though the fabrication technology for the device is very simple, characterization revealed a gauge factor (GF) of 756, which is several times larger than that achieved with conventional transducer effects, such as the piezoresistive effect. The fabricated device shows great application potential as a tactile sensor.

Original languageEnglish
Article number7578
JournalSensors
Volume21
Issue number22
DOIs
Publication statusPublished - 2021 Nov 1

Keywords

  • Force sensing
  • Magnetic thin film
  • Microdevice
  • Stress–impedance effect

ASJC Scopus subject areas

  • Analytical Chemistry
  • Information Systems
  • Atomic and Molecular Physics, and Optics
  • Biochemistry
  • Instrumentation
  • Electrical and Electronic Engineering

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