Micromachining with a force microscope tip assisted by electrostatic force

Kazuya Goto, Kazuhiro Hane

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)

Abstract

We present a new technique for surface modification with a force microscope tip. By using electrostatic force between a cantilever and a sample surthce, deformation on the surface can be performed with a very large load on the order of 10-6 N, even if the spring constant of the cantilever is small (on the order of 10-2 N/m). Because the tip does not shift laterally while the load is applied, pits are produced with precise positioning. Furthermore, very fast response of the modification on the order of 10-6 s was obtained.

Original languageEnglish
Pages (from-to)397-400
Number of pages4
JournalReview of Scientific Instruments
Volume67
Issue number2
DOIs
Publication statusPublished - 1996 Feb

ASJC Scopus subject areas

  • Instrumentation

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