Abstract
We present a new technique for surface modification with a force microscope tip. By using electrostatic force between a cantilever and a sample surthce, deformation on the surface can be performed with a very large load on the order of 10-6 N, even if the spring constant of the cantilever is small (on the order of 10-2 N/m). Because the tip does not shift laterally while the load is applied, pits are produced with precise positioning. Furthermore, very fast response of the modification on the order of 10-6 s was obtained.
Original language | English |
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Pages (from-to) | 397-400 |
Number of pages | 4 |
Journal | Review of Scientific Instruments |
Volume | 67 |
Issue number | 2 |
DOIs | |
Publication status | Published - 1996 Feb |
ASJC Scopus subject areas
- Instrumentation