Micromachining with a force microscope tip assisted by electrostatic force

Kazuya Goto; Kazuhiro Hane

doi:10.1063/1.1146603

Micromachining with a force microscope tip assisted by electrostatic force

Kazuya Goto, Kazuhiro Hane

ENG - Finemechanics

Research output: Contribution to journal › Article › peer-review

2 Citations (Scopus)

Abstract

We present a new technique for surface modification with a force microscope tip. By using electrostatic force between a cantilever and a sample surthce, deformation on the surface can be performed with a very large load on the order of 10^-6 N, even if the spring constant of the cantilever is small (on the order of 10^-2 N/m). Because the tip does not shift laterally while the load is applied, pits are produced with precise positioning. Furthermore, very fast response of the modification on the order of 10^-6 s was obtained.

Original language	English
Pages (from-to)	397-400
Number of pages	4
Journal	Review of Scientific Instruments
Volume	67
Issue number	2
DOIs	https://doi.org/10.1063/1.1146603
Publication status	Published - 1996 Feb

ASJC Scopus subject areas

Instrumentation

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10.1063/1.1146603

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title = "Micromachining with a force microscope tip assisted by electrostatic force",

abstract = "We present a new technique for surface modification with a force microscope tip. By using electrostatic force between a cantilever and a sample surthce, deformation on the surface can be performed with a very large load on the order of 10-6 N, even if the spring constant of the cantilever is small (on the order of 10-2 N/m). Because the tip does not shift laterally while the load is applied, pits are produced with precise positioning. Furthermore, very fast response of the modification on the order of 10-6 s was obtained.",

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AU - Goto, Kazuya

AU - Hane, Kazuhiro

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N2 - We present a new technique for surface modification with a force microscope tip. By using electrostatic force between a cantilever and a sample surthce, deformation on the surface can be performed with a very large load on the order of 10-6 N, even if the spring constant of the cantilever is small (on the order of 10-2 N/m). Because the tip does not shift laterally while the load is applied, pits are produced with precise positioning. Furthermore, very fast response of the modification on the order of 10-6 s was obtained.

AB - We present a new technique for surface modification with a force microscope tip. By using electrostatic force between a cantilever and a sample surthce, deformation on the surface can be performed with a very large load on the order of 10-6 N, even if the spring constant of the cantilever is small (on the order of 10-2 N/m). Because the tip does not shift laterally while the load is applied, pits are produced with precise positioning. Furthermore, very fast response of the modification on the order of 10-6 s was obtained.

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JF - Review of Scientific Instruments

SN - 0034-6748

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ER -

Micromachining with a force microscope tip assisted by electrostatic force

Abstract

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