Micromachines Made by Silicon Technology. Integrated Sensor and Actuator Systems by Micromaching.

Masayoshi Esashi

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)
Original languageJapanese
Pages (from-to)417-422
Number of pages6
JournalNihon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C
Volume62
Issue number594
DOIs
Publication statusPublished - 1996

ASJC Scopus subject areas

  • Mechanics of Materials
  • Mechanical Engineering
  • Industrial and Manufacturing Engineering

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