Micromachined Si cantilever arrays for parallel AFM operation

Yoomin Ahn, Takahito Ono, Masayoshi Esashi

Research output: Contribution to journalArticlepeer-review

11 Citations (Scopus)


Silicon cantilever arrays with a very small pitch for parallel AFM operations were studied. We fabricated 1x104 in eight groups and 1x30 Si probe arrays and produced a smaller pitch (15 μm) between probe tips by using Si anisotropic etching with a vertical wall shaped oxide mask. The vertical controls of Si probes were able to operate individually or in a group by integrating electrostatic actuators into the cantilevers of the probes. The fabricated Si cantilever arrays showed reasonable dynamic characteristics for the probe cantilever and reliable parallel operation of AFM.

Original languageEnglish
Pages (from-to)308-311
Number of pages4
JournalJournal of Mechanical Science and Technology
Issue number2
Publication statusPublished - 2008 Feb


  • Atomic force microscopy
  • Parallel AFM operations
  • Si cantilever array

ASJC Scopus subject areas

  • Mechanics of Materials
  • Mechanical Engineering


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