Abstract
Near-field microprobes with high optical transmittance for optical recording and multi-probes with a metal wire as a heater for thermal recording were fabricated by silicon micromachining. Pyramidal etch pits were defined on Si(100) wafer by oxidation, lithography, SiO2 patterning and Si etching with tetramethyl ammonium hydroxide (TMAH). The aperture showed a high optical transmittance due to a large opening angle in the SiO2 tip. Micro-thermal probe array based on atomic force microscopy (AFM) were fabricated and evaluated. The total recording speed for the device was found to be 300 Mbits/sec.
| Original language | English |
|---|---|
| Pages | II542-II543 |
| Publication status | Published - 2001 Dec 1 |
| Event | 4th Pacific Rim Conference on Lasers and Electro-Optics - Chiba, Japan Duration: 2001 Jul 15 → 2001 Jul 19 |
Other
| Other | 4th Pacific Rim Conference on Lasers and Electro-Optics |
|---|---|
| Country | Japan |
| City | Chiba |
| Period | 01/7/15 → 01/7/19 |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Atomic and Molecular Physics, and Optics
- Condensed Matter Physics
- Electrical and Electronic Engineering
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Ono, T., Minh, P. N., Lee, D. W., & Esashi, M. (2001). Micromachined probe for high density data storage. II542-II543. Paper presented at 4th Pacific Rim Conference on Lasers and Electro-Optics, Chiba, Japan.