Micromachined phase-shifted array-type mirau interferometer for swept-source OCT imaging: Design, microfabrication and experimental validation

C. Gorecki, J. Lullin, S. Perrin, S. Bargiel, J. Albero, O. Gaiffe, J. Rutkowski, J. M. Cote, J. Krauter, W. Osten, W. S. Wang, M. Weimer, J. Froemel

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)

Abstract

OCT instruments permit fast and non-invasive 3D optical biopsies of biological tissues. However, they are bulky and expensive, making them only affordable at the hospital and thus, not sufficiently used as an early diagnostic tool. Significant reduction of system cost and size is achieved by implementation of MOEMS technologies. We propose an active array of 4x4 Mirau microinterferometers where the reference micro-mirrors are carried by a vertical comb-drive microactuator, enabling the implementation of the phase-shifting technique that improves the sensitivity and eliminates unwanted interferometric terms. We focus on the design of the imaging system, the microfabrication and the assembly of the Mirau microinterferometer, and the swept-source OCT imaging.

Original languageEnglish
Article number#356665
Pages (from-to)1111-1125
Number of pages15
JournalBiomedical Optics Express
Volume10
Issue number3
DOIs
Publication statusPublished - 2019 Mar 1
Externally publishedYes

ASJC Scopus subject areas

  • Biotechnology
  • Atomic and Molecular Physics, and Optics

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