Micromachined optical near-field bow-tie antenna probe with integrated electrostatic actuator

Takahito Ono; Kentaro Iwami; Masayoshi Esashi

doi:10.1143/JJAP.44.L445

Micromachined optical near-field bow-tie antenna probe with integrated electrostatic actuator

Takahito Ono, Kentaro Iwami, Masayoshi Esashi

Research output: Contribution to journal › Article › peer-review

4 Citations (Scopus)

Abstract

A bow-tie antenna structure consisting of two opposing metal electrodes separated by a narrow gap is fabricated with an integrated electrostatic actuator to allow the gap to be narrowed further. This configuration allows the near-field localization and conversion efficiency to be optimized beyond that achievable by direct fabrication. The structure is expected to represent an excellent near-field source for high-resolution imaging with high optical transmittance. Electrostatic actuation is demonstrated in both contact- and noncontact-mode operations, and near-field imaging is successfully performed using the device in the illumination mode.

Original language	English
Pages (from-to)	L445-L448
Journal	Japanese Journal of Applied Physics, Part 2: Letters
Volume	44
Issue number	12-15
DOIs	https://doi.org/10.1143/JJAP.44.L445
Publication status	Published - 2005 Jun 24

Keywords

Bow-tie antenna
Electrostatic actuator
Micro-electro- mechanical systems
Scanning near-field optical microscopy
Surface plasmon

ASJC Scopus subject areas

Engineering(all)
Physics and Astronomy (miscellaneous)
Physics and Astronomy(all)

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10.1143/JJAP.44.L445

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title = "Micromachined optical near-field bow-tie antenna probe with integrated electrostatic actuator",

abstract = "A bow-tie antenna structure consisting of two opposing metal electrodes separated by a narrow gap is fabricated with an integrated electrostatic actuator to allow the gap to be narrowed further. This configuration allows the near-field localization and conversion efficiency to be optimized beyond that achievable by direct fabrication. The structure is expected to represent an excellent near-field source for high-resolution imaging with high optical transmittance. Electrostatic actuation is demonstrated in both contact- and noncontact-mode operations, and near-field imaging is successfully performed using the device in the illumination mode.",

keywords = "Bow-tie antenna, Electrostatic actuator, Micro-electro- mechanical systems, Scanning near-field optical microscopy, Surface plasmon",

author = "Takahito Ono and Kentaro Iwami and Masayoshi Esashi",

year = "2005",

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day = "24",

doi = "10.1143/JJAP.44.L445",

language = "English",

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T1 - Micromachined optical near-field bow-tie antenna probe with integrated electrostatic actuator

AU - Ono, Takahito

AU - Iwami, Kentaro

AU - Esashi, Masayoshi

PY - 2005/6/24

Y1 - 2005/6/24

N2 - A bow-tie antenna structure consisting of two opposing metal electrodes separated by a narrow gap is fabricated with an integrated electrostatic actuator to allow the gap to be narrowed further. This configuration allows the near-field localization and conversion efficiency to be optimized beyond that achievable by direct fabrication. The structure is expected to represent an excellent near-field source for high-resolution imaging with high optical transmittance. Electrostatic actuation is demonstrated in both contact- and noncontact-mode operations, and near-field imaging is successfully performed using the device in the illumination mode.

AB - A bow-tie antenna structure consisting of two opposing metal electrodes separated by a narrow gap is fabricated with an integrated electrostatic actuator to allow the gap to be narrowed further. This configuration allows the near-field localization and conversion efficiency to be optimized beyond that achievable by direct fabrication. The structure is expected to represent an excellent near-field source for high-resolution imaging with high optical transmittance. Electrostatic actuation is demonstrated in both contact- and noncontact-mode operations, and near-field imaging is successfully performed using the device in the illumination mode.

KW - Bow-tie antenna

KW - Electrostatic actuator

KW - Micro-electro- mechanical systems

KW - Scanning near-field optical microscopy

KW - Surface plasmon

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SP - L445-L448

JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

SN - 0021-4922

IS - 12-15

ER -

Micromachined optical near-field bow-tie antenna probe with integrated electrostatic actuator

Abstract

Keywords

ASJC Scopus subject areas

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