Micromachined optical components integrated with photodiode

M. Sasaki; Y. Arai; H. Takebe; K. Hane

doi:10.1109/IMNC.1998.730039

Micromachined optical components integrated with photodiode

M. Sasaki, Y. Arai, H. Takebe, K. Hane

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

We have fabricated Si optical component integrated with the photodiode. The combined device offers new application. The transparent position sensor enables the alignment monitor at many points of the large syst,em and the pinhole realizes the automatic alignment.

Original language	English
Title of host publication	Digest of Papers - Microprocesses and Nanotechnology 1998
Subtitle of host publication	1998 International Microprocesses and Nanotechnology Conference
Editors	Hyung Joon Yoo, Shinji Okazaki, Jinho Ahn, Ohyun Kim, Masanori Komuro
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	192-193
Number of pages	2
ISBN (Electronic)	4930813832, 9784930813831
DOIs	https://doi.org/10.1109/IMNC.1998.730039
Publication status	Published - 1998
Externally published	Yes
Event	1998 International Microprocesses and Nanotechnology Conference, MNC 1998 - Kyoungju, Korea, Republic of Duration: 1998 Jul 13 → 1998 Jul 16

Publication series

Name	Digest of Papers - Microprocesses and Nanotechnology 1998: 1998 International Microprocesses and Nanotechnology Conference
Volume	1998-July

Other

Other	1998 International Microprocesses and Nanotechnology Conference, MNC 1998
Country/Territory	Korea, Republic of
City	Kyoungju
Period	98/7/13 → 98/7/16

ASJC Scopus subject areas

Materials Science(all)
Nuclear and High Energy Physics
Computer Science Applications

Access to Document

10.1109/IMNC.1998.730039

Cite this

Sasaki, M., Arai, Y., Takebe, H., & Hane, K. (1998). Micromachined optical components integrated with photodiode. In H. J. Yoo, S. Okazaki, J. Ahn, O. Kim, & M. Komuro (Eds.), Digest of Papers - Microprocesses and Nanotechnology 1998: 1998 International Microprocesses and Nanotechnology Conference (pp. 192-193). [730039] (Digest of Papers - Microprocesses and Nanotechnology 1998: 1998 International Microprocesses and Nanotechnology Conference; Vol. 1998-July). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/IMNC.1998.730039

Micromachined optical components integrated with photodiode. / Sasaki, M.; Arai, Y.; Takebe, H.; Hane, K.

Digest of Papers - Microprocesses and Nanotechnology 1998: 1998 International Microprocesses and Nanotechnology Conference. ed. / Hyung Joon Yoo; Shinji Okazaki; Jinho Ahn; Ohyun Kim; Masanori Komuro. Institute of Electrical and Electronics Engineers Inc., 1998. p. 192-193 730039 (Digest of Papers - Microprocesses and Nanotechnology 1998: 1998 International Microprocesses and Nanotechnology Conference; Vol. 1998-July).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Sasaki, M, Arai, Y, Takebe, H & Hane, K 1998, Micromachined optical components integrated with photodiode. in HJ Yoo, S Okazaki, J Ahn, O Kim & M Komuro (eds), Digest of Papers - Microprocesses and Nanotechnology 1998: 1998 International Microprocesses and Nanotechnology Conference., 730039, Digest of Papers - Microprocesses and Nanotechnology 1998: 1998 International Microprocesses and Nanotechnology Conference, vol. 1998-July, Institute of Electrical and Electronics Engineers Inc., pp. 192-193, 1998 International Microprocesses and Nanotechnology Conference, MNC 1998, Kyoungju, Korea, Republic of, 98/7/13. https://doi.org/10.1109/IMNC.1998.730039

Sasaki M, Arai Y, Takebe H, Hane K. Micromachined optical components integrated with photodiode. In Yoo HJ, Okazaki S, Ahn J, Kim O, Komuro M, editors, Digest of Papers - Microprocesses and Nanotechnology 1998: 1998 International Microprocesses and Nanotechnology Conference. Institute of Electrical and Electronics Engineers Inc. 1998. p. 192-193. 730039. (Digest of Papers - Microprocesses and Nanotechnology 1998: 1998 International Microprocesses and Nanotechnology Conference). https://doi.org/10.1109/IMNC.1998.730039

Sasaki, M. ; Arai, Y. ; Takebe, H. ; Hane, K. / Micromachined optical components integrated with photodiode. Digest of Papers - Microprocesses and Nanotechnology 1998: 1998 International Microprocesses and Nanotechnology Conference. editor / Hyung Joon Yoo ; Shinji Okazaki ; Jinho Ahn ; Ohyun Kim ; Masanori Komuro. Institute of Electrical and Electronics Engineers Inc., 1998. pp. 192-193 (Digest of Papers - Microprocesses and Nanotechnology 1998: 1998 International Microprocesses and Nanotechnology Conference).

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abstract = "We have fabricated Si optical component integrated with the photodiode. The combined device offers new application. The transparent position sensor enables the alignment monitor at many points of the large syst,em and the pinhole realizes the automatic alignment.",

author = "M. Sasaki and Y. Arai and H. Takebe and K. Hane",

note = "Publisher Copyright: Copyright {\textcopyright} 2018 IEEE - All rights reserved.; 1998 International Microprocesses and Nanotechnology Conference, MNC 1998 ; Conference date: 13-07-1998 Through 16-07-1998",

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doi = "10.1109/IMNC.1998.730039",

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ER -

Micromachined optical components integrated with photodiode

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