TY - GEN
T1 - Micromachined optical components integrated with photodiode
AU - Sasaki, M.
AU - Arai, Y.
AU - Takebe, H.
AU - Hane, K.
N1 - Publisher Copyright:
Copyright © 2018 IEEE - All rights reserved.
PY - 1998
Y1 - 1998
N2 - We have fabricated Si optical component integrated with the photodiode. The combined device offers new application. The transparent position sensor enables the alignment monitor at many points of the large syst,em and the pinhole realizes the automatic alignment.
AB - We have fabricated Si optical component integrated with the photodiode. The combined device offers new application. The transparent position sensor enables the alignment monitor at many points of the large syst,em and the pinhole realizes the automatic alignment.
UR - http://www.scopus.com/inward/record.url?scp=85051425403&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85051425403&partnerID=8YFLogxK
U2 - 10.1109/IMNC.1998.730039
DO - 10.1109/IMNC.1998.730039
M3 - Conference contribution
AN - SCOPUS:85051425403
T3 - Digest of Papers - Microprocesses and Nanotechnology 1998: 1998 International Microprocesses and Nanotechnology Conference
SP - 192
EP - 193
BT - Digest of Papers - Microprocesses and Nanotechnology 1998
A2 - Yoo, Hyung Joon
A2 - Okazaki, Shinji
A2 - Ahn, Jinho
A2 - Kim, Ohyun
A2 - Komuro, Masanori
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 1998 International Microprocesses and Nanotechnology Conference, MNC 1998
Y2 - 13 July 1998 through 16 July 1998
ER -