Micromachined optical components integrated with photodiode

M. Sasaki; Y. Arai; H. Takebe; K. Hane

doi:10.1109/IMNC.1998.730039

Micromachined optical components integrated with photodiode

M. Sasaki, Y. Arai, H. Takebe, K. Hane

ENG - Finemechanics

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

We have fabricated Si optical component integrated with the photodiode. The combined device offers new application. The transparent position sensor enables the alignment monitor at many points of the large syst,em and the pinhole realizes the automatic alignment.

Original language	English
Title of host publication	Digest of Papers - Microprocesses and Nanotechnology 1998
Subtitle of host publication	1998 International Microprocesses and Nanotechnology Conference
Editors	Hyung Joon Yoo, Shinji Okazaki, Jinho Ahn, Ohyun Kim, Masanori Komuro
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	192-193
Number of pages	2
ISBN (Electronic)	4930813832, 9784930813831
DOIs	https://doi.org/10.1109/IMNC.1998.730039
Publication status	Published - 1998 Jan 1
Event	1998 International Microprocesses and Nanotechnology Conference, MNC 1998 - Kyoungju, Korea, Republic of Duration: 1998 Jul 13 → 1998 Jul 16

Publication series

Name	Digest of Papers - Microprocesses and Nanotechnology 1998: 1998 International Microprocesses and Nanotechnology Conference
Volume	1998-July

Other

Other	1998 International Microprocesses and Nanotechnology Conference, MNC 1998
Country	Korea, Republic of
City	Kyoungju
Period	98/7/13 → 98/7/16

ASJC Scopus subject areas

Materials Science(all)
Nuclear and High Energy Physics
Computer Science Applications

Access to Document

10.1109/IMNC.1998.730039

Fingerprint Dive into the research topics of 'Micromachined optical components integrated with photodiode'. Together they form a unique fingerprint.

Cite this

Sasaki, M., Arai, Y., Takebe, H., & Hane, K. (1998). Micromachined optical components integrated with photodiode. In H. J. Yoo, S. Okazaki, J. Ahn, O. Kim, & M. Komuro (Eds.), Digest of Papers - Microprocesses and Nanotechnology 1998: 1998 International Microprocesses and Nanotechnology Conference (pp. 192-193). [730039] (Digest of Papers - Microprocesses and Nanotechnology 1998: 1998 International Microprocesses and Nanotechnology Conference; Vol. 1998-July). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/IMNC.1998.730039

Micromachined optical components integrated with photodiode. / Sasaki, M.; Arai, Y.; Takebe, H.; Hane, K.

Digest of Papers - Microprocesses and Nanotechnology 1998: 1998 International Microprocesses and Nanotechnology Conference. ed. / Hyung Joon Yoo; Shinji Okazaki; Jinho Ahn; Ohyun Kim; Masanori Komuro. Institute of Electrical and Electronics Engineers Inc., 1998. p. 192-193 730039 (Digest of Papers - Microprocesses and Nanotechnology 1998: 1998 International Microprocesses and Nanotechnology Conference; Vol. 1998-July).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Sasaki, M, Arai, Y, Takebe, H & Hane, K 1998, Micromachined optical components integrated with photodiode. in HJ Yoo, S Okazaki, J Ahn, O Kim & M Komuro (eds), Digest of Papers - Microprocesses and Nanotechnology 1998: 1998 International Microprocesses and Nanotechnology Conference., 730039, Digest of Papers - Microprocesses and Nanotechnology 1998: 1998 International Microprocesses and Nanotechnology Conference, vol. 1998-July, Institute of Electrical and Electronics Engineers Inc., pp. 192-193, 1998 International Microprocesses and Nanotechnology Conference, MNC 1998, Kyoungju, Korea, Republic of, 98/7/13. https://doi.org/10.1109/IMNC.1998.730039

Sasaki M, Arai Y, Takebe H, Hane K. Micromachined optical components integrated with photodiode. In Yoo HJ, Okazaki S, Ahn J, Kim O, Komuro M, editors, Digest of Papers - Microprocesses and Nanotechnology 1998: 1998 International Microprocesses and Nanotechnology Conference. Institute of Electrical and Electronics Engineers Inc. 1998. p. 192-193. 730039. (Digest of Papers - Microprocesses and Nanotechnology 1998: 1998 International Microprocesses and Nanotechnology Conference). https://doi.org/10.1109/IMNC.1998.730039

Sasaki, M. ; Arai, Y. ; Takebe, H. ; Hane, K. / Micromachined optical components integrated with photodiode. Digest of Papers - Microprocesses and Nanotechnology 1998: 1998 International Microprocesses and Nanotechnology Conference. editor / Hyung Joon Yoo ; Shinji Okazaki ; Jinho Ahn ; Ohyun Kim ; Masanori Komuro. Institute of Electrical and Electronics Engineers Inc., 1998. pp. 192-193 (Digest of Papers - Microprocesses and Nanotechnology 1998: 1998 International Microprocesses and Nanotechnology Conference).

@inproceedings{129e9eac4e9d429ead88b651fd4fcd44,

title = "Micromachined optical components integrated with photodiode",

abstract = "We have fabricated Si optical component integrated with the photodiode. The combined device offers new application. The transparent position sensor enables the alignment monitor at many points of the large syst,em and the pinhole realizes the automatic alignment.",

author = "M. Sasaki and Y. Arai and H. Takebe and K. Hane",

year = "1998",

month = jan,

day = "1",

doi = "10.1109/IMNC.1998.730039",

language = "English",

series = "Digest of Papers - Microprocesses and Nanotechnology 1998: 1998 International Microprocesses and Nanotechnology Conference",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "192--193",

editor = "Yoo, {Hyung Joon} and Shinji Okazaki and Jinho Ahn and Ohyun Kim and Masanori Komuro",

booktitle = "Digest of Papers - Microprocesses and Nanotechnology 1998",

note = "1998 International Microprocesses and Nanotechnology Conference, MNC 1998 ; Conference date: 13-07-1998 Through 16-07-1998",

}

TY - GEN

T1 - Micromachined optical components integrated with photodiode

AU - Sasaki, M.

AU - Arai, Y.

AU - Takebe, H.

AU - Hane, K.

PY - 1998/1/1

Y1 - 1998/1/1

N2 - We have fabricated Si optical component integrated with the photodiode. The combined device offers new application. The transparent position sensor enables the alignment monitor at many points of the large syst,em and the pinhole realizes the automatic alignment.

AB - We have fabricated Si optical component integrated with the photodiode. The combined device offers new application. The transparent position sensor enables the alignment monitor at many points of the large syst,em and the pinhole realizes the automatic alignment.

UR - http://www.scopus.com/inward/record.url?scp=85051425403&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85051425403&partnerID=8YFLogxK

U2 - 10.1109/IMNC.1998.730039

DO - 10.1109/IMNC.1998.730039

M3 - Conference contribution

AN - SCOPUS:85051425403

T3 - Digest of Papers - Microprocesses and Nanotechnology 1998: 1998 International Microprocesses and Nanotechnology Conference

SP - 192

EP - 193

BT - Digest of Papers - Microprocesses and Nanotechnology 1998

A2 - Yoo, Hyung Joon

A2 - Okazaki, Shinji

A2 - Ahn, Jinho

A2 - Kim, Ohyun

A2 - Komuro, Masanori

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 1998 International Microprocesses and Nanotechnology Conference, MNC 1998

Y2 - 13 July 1998 through 16 July 1998

ER -

Micromachined optical components integrated with photodiode

Abstract

Publication series

Other

ASJC Scopus subject areas

Access to Document

Other files and links

Cite this