Micromachined Multi-Ion Sources Integrated Micro-Fluidic Channels

Nguyen Van Chinh, Le Van Minh, Takahito Ono, Hiroki Kuwano

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In this research, we develop micromachined multi-ion sources (multi-IS) integrated microfluidic channels. The multi-IS was consisted of an array of micro-emitters surrounded by microfluidic channels. A matrix of 10 x 10 micro-emitters in which each emitter was surrounded by four-segmented annular microfluidic channels of 10 μm in width were fabricated. The ion emission evaluation confirmed that the fabricated EMIM-BF based IS was able to operate a wide range of applied voltage from 4.7 kV to 6 kV. The maximum etching yield of 17 atoms per ion was achieved. The matrix of etching dimples on the Si target proved the ion emission from multi-IS without IL droplet existence.

Original languageEnglish
Title of host publication34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages14-17
Number of pages4
ISBN (Electronic)9781665419123
DOIs
Publication statusPublished - 2021 Jan 25
Event34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021 - Virtual, Gainesville, United States
Duration: 2021 Jan 252021 Jan 29

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume2021-January
ISSN (Print)1084-6999

Conference

Conference34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021
Country/TerritoryUnited States
CityVirtual, Gainesville
Period21/1/2521/1/29

Keywords

  • Ionic liquid
  • array ion sources
  • ion source
  • multi-focused ion beam

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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