Microforming of metallic glasses with laser micromachined polyimide dies

Yasunori Saotome, Takashi Iijima, Tao Zhang, Akihisa Inoue

Research output: Contribution to journalConference articlepeer-review

7 Citations (Scopus)


We performed superplastic microforging and microextrusion of La-based and Pt-based metallic glasses using polyimide microdies fabricated by an excimer laser micromachining system. Superplastic forming can be performed at low applied stresses below 10 MPa and low temperatures below 570K in each material's supercooled liquid temperature range, since engineering plastics, such as a polyimide, are used for the die material. With this system, we fabricated microdies for microgears. Applying superplastic microforging and microextrusion, we superplastically formed micro L-channel shafts, micro cantilevers and microgears of 500, 100 and 40 micrometers in pitch circle in the supercooled liquid state. These results demonstrate the advantages of metallic glasses and microforming techniques employing laser-micromachined polyimide dies.

Original languageEnglish
Pages (from-to)655-658
Number of pages4
JournalJournal of Metastable and Nanocrystalline Materials
Publication statusPublished - 2003
EventProceedings of the 9th International Symposium on Metastable Mechanically Alloyed and Nanocrystalline Materials (ISMANAM-2002) - Seoul, Korea, Republic of
Duration: 2002 Sep 82002 Sep 12


  • Die
  • Excimer Laser
  • MEMS
  • Metallic Glasses
  • Microforming
  • Superplasticity

ASJC Scopus subject areas

  • Materials Science (miscellaneous)
  • Materials Science(all)
  • Condensed Matter Physics
  • Physical and Theoretical Chemistry


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