Microforming of MEMS parts with amorphous alloys

Yasunori Saotome, Tao Zhang, Akihisa Inoue

Research output: Contribution to journalConference articlepeer-review

41 Citations (Scopus)


Microformability of new amorphous alloys in the supercooled liquid state and microforming techniques for the materials are shown. In the supercooled liquid state, the materials reveal perfect Newtonian viscous flow characteristics and furthermore exhibit an excellent property of microformability on a submicron scale. As for microforming techniques, microforging and micro extrusion of amorphous alloys are introduced in addition to the fabrication method of micro dies of photochemically machinable glass. As a result, amorphous alloys are expected as one of the most useful materials to fabricate micromachines.

Original languageEnglish
Pages (from-to)385-390
Number of pages6
JournalMaterials Research Society Symposium - Proceedings
Publication statusPublished - 1999
EventProceedings of the 1998 MRS Fall Meeting - Symposium MM on'Bulk Metallic Glasses' - Boston, MA, USA
Duration: 1998 Dec 11998 Dec 3

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering


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