Microforming of MEMS parts with amorphous alloys

Yasunori Saotome, Tao Zhang, Akihisa Inoue

Research output: Contribution to journalConference articlepeer-review

36 Citations (Scopus)

Abstract

Microformability of new amorphous alloys in the supercooled liquid state and microforming techniques for the materials are shown. In the supercooled liquid state, the materials reveal perfect Newtonian viscous flow characteristics and furthermore exhibit an excellent property of microformability on a submicron scale. As for microforming techniques, microforging and micro extrusion of amorphous alloys are introduced in addition to the fabrication method of micro dies of photochemically machinable glass. As a result, amorphous alloys are expected as one of the most useful materials to fabricate micromachines.

Original languageEnglish
Pages (from-to)385-390
Number of pages6
JournalMaterials Research Society Symposium - Proceedings
Volume554
Publication statusPublished - 1999 Dec 1
EventProceedings of the 1998 MRS Fall Meeting - Symposium MM on'Bulk Metallic Glasses' - Boston, MA, USA
Duration: 1998 Dec 11998 Dec 3

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

Fingerprint Dive into the research topics of 'Microforming of MEMS parts with amorphous alloys'. Together they form a unique fingerprint.

Cite this