Microformability of optical glasses for precision molding

Yasunori Saotome, Kenichi Imai, Narihito Sawanobori

Research output: Contribution to journalArticlepeer-review

35 Citations (Scopus)

Abstract

We investigated macroscopic and microscopic deformation of optical glasses K-PSK100 and K-PG375 for precision molding. The materials are characterized by a low glass transition temperature Tg; Tg is 663 K for PSK100 and 616 K for PG375. The materials exhibit Newtonian viscous flow above Tg. We studied the temperature dependence of the normal viscosity and evaluated the microformability by the geometrical transferability of a V-grooved die shape to the material. The dies were made of (100)Si and the width of the V-groove Wg was 0.1-2.0μm. After die-forming, we measured the transferred shape of the material with AFM and analyzed the curvature r of the tip of the deformed specimen and the formed and filled area to the V-groove Rf. As a result, we found that the materials exhibit superior microformability due to the homogeneity on a nanometer scale and will be applied to micro- or nano-forming and thus contribute to mass production of micro/nano-devices.

Original languageEnglish
Pages (from-to)379-384
Number of pages6
JournalJournal of Materials Processing Technology
Volume140
Issue number1-3 SPEC.
DOIs
Publication statusPublished - 2003 Sep 22

Keywords

  • Glass
  • MEMS
  • Nano-forming
  • Newtonian viscous flow

ASJC Scopus subject areas

  • Ceramics and Composites
  • Computer Science Applications
  • Metals and Alloys
  • Industrial and Manufacturing Engineering

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