An approach for microfocusing of 82 keV x-rays with a sputtered-sliced Fresnel zone plate (SS-FZP) was described. The SS-FZP consisted of 50 layers of alternative copper layer and aluminum layer deposited on a gold core. The measured distance between the SS-FZP and the focal point was 1.64 m at 82 keV. The achieved beam size was found to be 1.1 μm in vertical and 1.3 μm in horizontal directions while the measured flux density was 7×10 5 (photons/s/μm2).
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