Microfabrication of thermoelectric materials by silicon molding process

Jing Feng Li, Shuji Tanaka, Toshiya Umeki, Shinya Sugimoto, Masayoshi Esashi, Ryuzo Watanabe

Research output: Contribution to journalArticlepeer-review

41 Citations (Scopus)

Abstract

Thermoelectric microgenerators and microcoolers are becoming technologically important for microelectromechanical systems (MEMS), but the conventional cutting and assembling techniques have limitation in miniaturizing the dimensions of thermoelectric devices to the micrometer order. We have combined MEMS technology and materials processing into a novel process to manufacture thermoelectric micro-modules with densely aligned fine-scale and high-aspect-ratio P-N elements. Our process consists of the following major steps: (1) micromachining a silicon mold; (2) filling the mold with thermoelectric materials; (3) connecting P- and N-type elements and assembling the whole module. By using the present process, Bi-Sb-Te system thermoelectric elements of 300 μm height and 40 μm cross-sectional width can be fabricated successfully.

Original languageEnglish
Pages (from-to)97-102
Number of pages6
JournalSensors and Actuators, A: Physical
Volume108
Issue number1-3
DOIs
Publication statusPublished - 2003 Nov 15

Keywords

  • Materials micro-processing
  • Microfabrication
  • Silicon molding
  • Thermoelectric device

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering

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