Microfabrication of photodetector based on carbon nanotube array

Wu Ying, Huang Shaochun, Ou Yihong, Ikusei Rin, Bai Junjie, Xiang Yi

    Research output: Contribution to journalArticle

    Abstract

    Carbon nanotube array have a potential to be efficient spectrum detection material due to their unique electronic properties. A photodetector based on carbon nanotube is developed by fabricating the electrodes with photolithography techniques and then synthesizing the carbon nanotube array that contact with the electrodes with chemical vapor deposition oriented growing techniques. The structure of the photodetector based on carbon nanotube is characterized with scanning electron microscope pictures and the electronic behavior of photodetector based on carbon nanotube array is investigated with I-V curves. The photocurrent of the developed device has been measured under the different light illumination. Photodetector based on carbon nanotube array has different current output corresponding to different light illumination, which can be used to detect the incident light and verify the functionality of the photodetector based on carbon nanotube array, giving a new idea for the fabrication of devices based on carbon nanotube.

    Original languageEnglish
    Pages (from-to)366-369
    Number of pages4
    JournalJournal of Nanoelectronics and Optoelectronics
    Volume7
    Issue number4
    DOIs
    Publication statusPublished - 2012 Aug 1

    Keywords

    • Carbon Nanotubes
    • Microfabrication
    • Photodetector

    ASJC Scopus subject areas

    • Electronic, Optical and Magnetic Materials
    • Electrical and Electronic Engineering

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