Abstract
We experimentally investigated the dependence of spatial resolution on the shape of a microtip on our photocantilever, in order to improve the spatial resolution of near-field scanning optical microscopy. Two different cone angles of silicon-dioxide microtips were microfabricated by a new fabrication process. The experimental results, which indicate there is a relationship between the spatial resolution and cone angle of the microtip, were interpreted by calculations based on a simple theoretical model.
Original language | English |
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Pages (from-to) | 3547-3551 |
Number of pages | 5 |
Journal | Journal of Applied Physics |
Volume | 83 |
Issue number | 7 |
DOIs | |
Publication status | Published - 1998 Apr 1 |
Externally published | Yes |
ASJC Scopus subject areas
- Physics and Astronomy(all)