Microfabrication of microtip on photocantilever for near-field scanning microscopy and investigation of effect of microtip shape on spatial resolution

Yuriko Tanaka; Kenji Fukuzawa; Hiroki Kuwano

doi:10.1063/1.366569

Microfabrication of microtip on photocantilever for near-field scanning microscopy and investigation of effect of microtip shape on spatial resolution

Yuriko Tanaka, Kenji Fukuzawa, Hiroki Kuwano

Research output: Contribution to journal › Article › peer-review

10 Citations (Scopus)

Abstract

We experimentally investigated the dependence of spatial resolution on the shape of a microtip on our photocantilever, in order to improve the spatial resolution of near-field scanning optical microscopy. Two different cone angles of silicon-dioxide microtips were microfabricated by a new fabrication process. The experimental results, which indicate there is a relationship between the spatial resolution and cone angle of the microtip, were interpreted by calculations based on a simple theoretical model.

Original language	English
Pages (from-to)	3547-3551
Number of pages	5
Journal	Journal of Applied Physics
Volume	83
Issue number	7
DOIs	https://doi.org/10.1063/1.366569
Publication status	Published - 1998 Apr 1
Externally published	Yes

ASJC Scopus subject areas

Physics and Astronomy(all)

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10.1063/1.366569

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abstract = "We experimentally investigated the dependence of spatial resolution on the shape of a microtip on our photocantilever, in order to improve the spatial resolution of near-field scanning optical microscopy. Two different cone angles of silicon-dioxide microtips were microfabricated by a new fabrication process. The experimental results, which indicate there is a relationship between the spatial resolution and cone angle of the microtip, were interpreted by calculations based on a simple theoretical model.",

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AU - Tanaka, Yuriko

AU - Fukuzawa, Kenji

AU - Kuwano, Hiroki

PY - 1998/4/1

Y1 - 1998/4/1

N2 - We experimentally investigated the dependence of spatial resolution on the shape of a microtip on our photocantilever, in order to improve the spatial resolution of near-field scanning optical microscopy. Two different cone angles of silicon-dioxide microtips were microfabricated by a new fabrication process. The experimental results, which indicate there is a relationship between the spatial resolution and cone angle of the microtip, were interpreted by calculations based on a simple theoretical model.

AB - We experimentally investigated the dependence of spatial resolution on the shape of a microtip on our photocantilever, in order to improve the spatial resolution of near-field scanning optical microscopy. Two different cone angles of silicon-dioxide microtips were microfabricated by a new fabrication process. The experimental results, which indicate there is a relationship between the spatial resolution and cone angle of the microtip, were interpreted by calculations based on a simple theoretical model.

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Microfabrication of microtip on photocantilever for near-field scanning microscopy and investigation of effect of microtip shape on spatial resolution

Abstract

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