Microfabrication of microtip on photocantilever for near-field scanning microscopy and investigation of effect of microtip shape on spatial resolution

Yuriko Tanaka, Kenji Fukuzawa, Hiroki Kuwano

Research output: Contribution to journalArticle

10 Citations (Scopus)

Abstract

We experimentally investigated the dependence of spatial resolution on the shape of a microtip on our photocantilever, in order to improve the spatial resolution of near-field scanning optical microscopy. Two different cone angles of silicon-dioxide microtips were microfabricated by a new fabrication process. The experimental results, which indicate there is a relationship between the spatial resolution and cone angle of the microtip, were interpreted by calculations based on a simple theoretical model.

Original languageEnglish
Pages (from-to)3547-3551
Number of pages5
JournalJournal of Applied Physics
Volume83
Issue number7
DOIs
Publication statusPublished - 1998 Apr 1
Externally publishedYes

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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