Microfabrication of a scanning probe with NV centers in a selectively grown diamond thin film through a xenon difluoride etching process

Minjie Zhu, Jinhua Li, Masaya Toda, Takahito Ono

Research output: Contribution to journalArticlepeer-review

Abstract

A scanning probe with nitrogen vacancy (NV) centers in diamond thin film was fabricated via a standard micro/nano electromechanical system process. The diamond thin film was selectively grown by microwave plasma enhanced chemical vapor deposition on a partially nucleated silicon surface. NV centers are embedded during the diamond growth with a pure nitrogen gas flow to the growth chamber. The existence of NV centers in the diamond thin film was confirmed by photoluminescence measurements. In addition, we found that a xenon difluoride (XeF2) etching process and anneal treatment have an influence on the existence of NV centers in the diamond. The fabricated scanning probe with NV centers in diamond thin film can be used as a magnetic scanning sensor. It is anticipated that the alternative method of selectively growing diamond thin film provides various diamond structures in diverse applications.

Original languageEnglish
Article number125007
JournalJournal of Micromechanics and Microengineering
Volume27
Issue number12
DOIs
Publication statusPublished - 2017 Oct 30

Keywords

  • MEMS/NEMS
  • NV center
  • scanning probe
  • selectively grown diamond thin film

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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